Plasma Processing Control with Simulator-Based Parameter Tuning

The patent applies preliminary action by pre-calculating and storing optimal matching circuit constants for various operational conditions in a database before actual plasma processing. When plasma ignition is needed, the system simply retrieves the pre-determined constant based on current conditions (gas type, pressure, power), eliminating the need for time-consuming real-time experimentation and achieving stable ignition immediately.

The patent replaces the mechanical trial-and-error adjustment process with an automated information processing system. A computer calculates optimal constants using stored plasma characteristics data, stores these in a database, and automatically retrieves them during operation. This substitutes manual experimentation with automated computational methods, dramatically reducing adjustment time while maintaining ignition stability.

The system applies self-service by automatically selecting and adjusting the optimal matching circuit constant without requiring operator intervention. The computer monitors operational conditions, retrieves the appropriate constant from the database, and automatically configures the matching circuit. This eliminates the need for operators to understand complex impedance matching principles or perform manual adjustments, making the system easy to operate while maintaining high ignition reliability.

The patent implements feedback by continuously monitoring plasma ignition status and operational conditions, then using this information to automatically select the optimal matching circuit constant from the database. The system adjusts the matching circuit based on real-time feedback about plasma state and processing conditions, ensuring reliable ignition while removing the burden of manual adjustment from the operator.

The patent performs the experimentation work in advance by pre-calculating optimal matching constants for various gas types, pressures, and power levels during system setup or maintenance periods. These pre-determined constants are stored in a database for rapid retrieval during actual production. This separates the research phase from the production phase, allowing extensive experimentation to be done beforehand without impacting ongoing processing throughput.

The system dynamically adapts to changing operational conditions by automatically retrieving the appropriate pre-calculated matching constant from the database based on current gas type, pressure, and power settings. This dynamic selection ensures optimal plasma ignition stability for each specific condition without requiring real-time experimentation, maintaining high productivity while adapting to varying production requirements.