Plasma Chamber Heat Transfer Layout for Low-Pressure Cooling Flow
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Solution Overview
Problem
Existing plasma processing apparatuses face challenges in reducing the pressure at which a heat transfer medium is supplied to a flow path, leading to potential deformation of temperature adjustment targets.
Innovation Solution
A plasma processing apparatus is designed with a supply system comprising a first tank, a second tank, a pump, and a heat exchanger, where the second tank is positioned lower than the first tank, allowing the heat transfer medium to flow due to gravity, thereby reducing the pressure supplied to the flow path and preventing deformation of temperature adjustment targets.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a compressor is used to supply heat transfer medium to the flow path, then the heat transfer medium can be supplied reliably, but the supply pressure becomes too high causing deformation of temperature adjustment targets
Solution Approach 1:
The patent positions the second tank at a lower elevation than the first tank, creating a gravitational potential difference that enables the heat transfer medium to flow from the first tank to the second tank and then to the flow path without requiring high supply pressure. This gravitational flow mechanism eliminates the need for a compressor while maintaining reliable heat transfer medium supply.
Solution Approach 2:
The second tank serves as an intermediary component between the first tank and the flow path. It receives heat transfer medium from the first tank via gravitational flow and supplies it to the flow path at a reduced pressure, acting as a pressure-regulating intermediate stage that prevents deformation of temperature adjustment targets.
2Productivity
If high pressure is used to supply heat transfer medium, then the flow rate can be increased, but the temperature adjustment targets deform due to excessive pressure
Solution Approach 1:
By utilizing the elevation difference between the first and second tanks, the system generates sufficient flow rate through gravitational potential energy conversion. This eliminates the need for high-pressure supply while maintaining adequate heat transfer medium flow to the flow path, thereby preventing deformation of temperature adjustment targets and preserving manufacturing precision.
Solution Approach 2:
The patent employs hydraulic principles by using gravitational flow of the heat transfer medium (a liquid) from the first tank through the second tank to the flow path. This hydraulic approach naturally limits the supply pressure to levels that prevent deformation of temperature adjustment targets while maintaining sufficient flow rate for effective heat transfer.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the pressure of the heat transfer medium supplied to the flow path, preventing deformation of temperature adjustment targets and ensuring stable operation of the plasma processing apparatus.
Implementation Method 1
The second tank is disposed at a position lower than a position of the first tank... allowing the heat transfer medium to flow due to gravity, thereby reducing the pressure supplied to the flow path
Implementation Method 2
The pump is connected between the third pipe and the second tank. The pump is configured to pump the heat transfer medium stored in the second tank to the first tank via the third pipe
Implementation Method 3
The heat exchanger is provided upstream of the flow path. The heat exchanger is configured to adjust a temperature of the heat transfer medium
Data Source
AI summary
A technique for reducing a pressure at which a heat transfer medium is supplied to a flow path is provided. In an exemplary embodiment, a plasma processing apparatus is provided. The plasma processing apparatus includes a chamber, a plasma generator, a temperature adjustment target, and a supply. The supply supplies a heat transfer medium to the flow path and includes a first tank, a second tank, a pump, and a heat exchanger. The first tank stores the heat transfer medium and is connected to the flow path via a first pipe. The second tank stores the heat transfer medium, is connected to the flow path via a second pipe, and is connected to the first tank via a third pipe. The second tank is disposed at a position lower than a position of the first tank.