Plasma Chamber Cooling Loop With Liquefied Gas Pressure Control
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Solution Overview
Problem
Existing temperature control systems using volatile media like PFAS pose environmental pollution risks and are limited in usable temperature range, necessitating a solution that suppresses media release to the atmosphere and expands the usable temperature range.
Innovation Solution
A temperature control system that stores and supplies a gaseous medium at normal temperature and pressure, liquefies it, and circulates it under pressure to cool structures while minimizing atmospheric exposure, using a tank, cooler, pump, and pressing mechanism to enhance flow rate and expand the usable temperature range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a volatile temperature control medium like PFAS is used, then the cooling function is effective, but the medium releases to the atmosphere causing environmental pollution
Solution Approach 1:
The patent changes the physical state parameter of the temperature control medium from liquid to solid (freezing point -70°C or lower), which fundamentally alters its volatility characteristics and eliminates atmospheric release, thereby resolving the environmental pollution issue while maintaining cooling reliability
Solution Approach 2:
The patent utilizes phase transition of the temperature control medium by maintaining it in a frozen solid state through low temperature control, preventing evaporation and atmospheric release, thus eliminating environmental pollution while ensuring the medium remains available for cooling operations
2Productivity
If a liquid temperature control medium is stored in a tank, then the storage function is achieved, but the flow rate is insufficient for effective cooling
Solution Approach 1:
The patent introduces a pressing structure that applies pressure to the solid temperature control medium in the tank, forcing it to flow out at high speed despite its solid state, thereby achieving both sufficient storage capacity and high flow rate for effective cooling
Solution Approach 2:
The patent pre-freezes the temperature control medium in the tank before circulation begins, ensuring it is in a solid state ready for pressing and high-speed flow, which optimizes both storage efficiency and subsequent flow rate performance
3Speed
If the temperature control medium is circulated at high speed, then the cooling efficiency is improved, but the medium evaporates and releases to the atmosphere
Solution Approach 1:
The patent changes the temperature parameter to maintain the medium below its freezing point (-70°C or lower), keeping it in a solid non-volatile state that can be circulated at high speed without evaporation or atmospheric release, thus resolving both cooling efficiency and environmental protection requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively suppresses medium release to the atmosphere, expands the usable temperature range, and increases flow rate, allowing operation in low temperature regions while reducing environmental impact.
Implementation Method 1
a cooler that liquefies the temperature control medium stored in the tank
Implementation Method 2
a flow path through which the temperature control medium flows out to a temperature control structure that cools the structures by heat exchange with the temperature control medium
Implementation Method 3
a pressing structure that presses the liquid temperature control medium stored in the tank
Data Source
AI summary
A temperature control system for cooling structures in a plasma processing chamber, the temperature control system includes a tank that stores a gaseous temperature control medium at normal temperature and pressure; a cooler that liquefies the temperature control medium in the tank; an outflow flow path connected to an outflow port of the tank and forming a flow path through which the temperature control medium flows out to a temperature control structure that cools the structures by heat exchange with the temperature control medium; an inflow flow path connected to an inflow port of the tank and forming a flow path through which the temperature control medium flows in from the temperature control structure after heat exchange; a pump in the outflow flow path and that moves the temperature control medium stored in the tank; and a pressing structure that presses the liquid temperature control medium stored in the tank.