Laser-Sustained Plasma Brightness via Core Selective Pumping

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current laser-sustained plasma light sources are limited in brightness due to insufficient pumping of the hotter core region of the plasma, as increased pumping power primarily heats the cooler exterior regions.

Innovation Solution

A method and apparatus that focus illumination of specific wavelengths tuned to absorption lines of the plasma species, preferentially delivering energy to the hotter core region, while minimizing energy absorption in the cooler exterior regions, thereby enhancing plasma brightness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If pumping power is increased, then plasma size increases, but core temperature remains relatively unchanged

Engineering Contradiction:
Improveplasma sizeVSAvoidcore temperature
Core Design Contradiction:
Volume of moving objectVSTemperature

Solution Approach 1:

The patent applies local quality by selecting specific wavelengths that are preferentially absorbed in the hotter core region rather than uniformly distributed. By tuning the laser wavelength to match absorption lines of plasma species at core temperatures, the energy deposition becomes spatially selective, heating the core region more effectively while minimizing heating of the cooler exterior regions.

Inventive Principle:
Principle #3Local quality

2Illumination intensity

If pumping power is increased, then plasma brightness increases, but energy efficiency decreases

Engineering Contradiction:
Improveplasma brightnessVSAvoidenergy efficiency
Core Design Contradiction:
Illumination intensityVSLoss of energy

Solution Approach 1:

The patent changes the parameter of pumping wavelength to optimize energy coupling. By selecting wavelengths that correspond to absorption lines of plasma species at core temperatures, the system achieves more efficient energy transfer to the plasma core, increasing brightness while reducing wasted energy in cooler exterior regions.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach increases the average temperature of the core plasma region, leading to improved brightness and efficiency of the plasma light source by selectively pumping the hotter core, overcoming the limitations of standard techniques.

Implementation Method 1

the illumination of the first selected wavelength substantially absorbed by the first plasma species by tuning the first selected wavelength of the illumination to an absorption line of the first plasma species

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 2

Laser-sustained plasma light sources operate by focusing laser radiation into a gas volume in order to excite the gas, such as argon or xenon, into a plasma state, which is capable of emitting broadband light. This effect is typically referred to as 'pumping' the plasma.

Methodology Applied
Scientific EffectOptical pumping:

Data Source

PatentUS8658967B2Optically pumping to sustain plasma
Publication Date: 2014.02.25 KLA CORP
  • US8658967B2 patent drawing
  • US8658967B2 patent drawing
  • US8658967B2 patent drawing

AI summary

A method for sustaining a plasma includes providing a volume of a gas; generating illumination of a first selected wavelength; and forming a first plasma species in a first region of the gas and a second plasma species in a second region of the gas by focusing the illumination of the first wavelength into the volume of gas, the first region having a first average temperature and a first size, the second region having a second average temperature and a second size, the illumination of the first selected wavelength transmitted by the second plasma species, the illumination of the first selected wavelength absorbed by the first plasma species by tuning the first selected wavelength of the illumination to an absorption line of the first plasma species, the absorption line being associated with an ionic absorption transition or an excited neutral transition of the first plasma species.