Plasma De-activation via Tuned LC Circuit
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Solution Overview
Problem
Existing plasma de-activation methods result in the loss of reactive neutrals and inefficient removal of electrically charged species, as they either rely on long paths or baffles, which are not effective in eliminating charges without compromising the neutral species.
Innovation Solution
A plasma de-activation system utilizing a passageway with a tuned LC circuit to selectively de-activate plasma by matching the frequency of the RF power used for plasma generation, ensuring efficient removal of charged particles while preserving reactive neutrals, which can be implemented in various configurations including multiple plasma sources and chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If long path or baffle methods are used to de-activate plasma, then electrically charged species are removed, but reactive neutral species are lost
Solution Approach 1:
A Faraday shield is introduced as an intermediary component between the plasma source and sample chamber. This conductive barrier selectively interacts with charged particles through electromagnetic induction, allowing their recombination into neutral species while permitting neutral species to pass through unaffected, thus resolving the contradiction between effective plasma de-activation and preservation of reactive neutrals
Solution Approach 2:
The patent changes the key parameter from path length (geometric approach) to electromagnetic field interaction (physical property approach). By introducing a conductive Faraday shield that creates an electromagnetic barrier, the system achieves plasma de-activation through parameter change in electrical conductivity rather than through geometric path extension, enabling selective removal of charged species while preserving neutrals
2Reliability
If wire mesh screen (Faraday shield) is used to eliminate electrical charges, then plasma is de-activated, but reactive neutrals are also blocked
Solution Approach 1:
The Faraday shield is designed with local quality variations through strategic aperture placement and sizing. Different regions of the shield have different properties: solid conductive areas block charged particles while aperture regions allow neutral species passage. This spatial differentiation of functional properties enables simultaneous plasma de-activation and neutral species delivery to the sample chamber
3Reliability
If long path length is used from plasma chamber to sample chamber, then charged particles are removed through recombination, but the system complexity and size increase
Solution Approach 1:
The patent extracts the plasma de-activation function from the geometric path structure and concentrates it into a compact Faraday shield component. Instead of relying on long path lengths for natural recombination, the system uses a dedicated electromagnetic barrier that performs de-activation in a compact configuration, thereby reducing overall system complexity and size while maintaining effective charged particle removal
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively de-activates plasma, maximizing the production of activated neutral atoms and molecules, and can be applied across various applications by efficiently eliminating electrically charged species without contaminating the reactive gases.
Implementation Method 1
the passageway has a tuned LC circuit with a tuned frequency to selectively de-activate plasma in the passageway
Implementation Method 2
applying RF power to dissociate said one or more gases and create a plasma
Implementation Method 3
Plasma apparatus can be divided into two broad categories, downstream or remote plasma and direct plasma
Implementation Method 4
the use of a plasma or a glow discharge for dissociating one or more gases into reactive and non-reactive ionic and reactive and non-reactive neutral species
Data Source
AI summary
An apparatus and method to de-activate a plasma from one or more plasma sources in at least one passageway having a tuned LC circuit. A first embodiment of the invention involves a method to de-activate a plasma. A second embodiment of the invention involves an apparatus to de-activate a plasma. Certain embodiments of the invention can also be used to maximize the production of activated neutral atoms and molecules from the de-activation apparatus.