Laser-Produced Plasma Debris Mitigation via Conditioning Pulse Sequences
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Solution Overview
Problem
Existing laser-produced plasma devices face challenges with debris mitigation, stability, and conversion efficiency due to limitations in target shaping and debris particle size, particularly in generating high-intensity electromagnetic radiation like EUV and X-ray radiation.
Innovation Solution
A method involving a pulse sequence of four to nine conditioning laser pulses with time intervals of 200 ns or less, applied before or after the main laser pulse, to shape the target and reduce debris particle size, enhance conversion efficiency, and deflect debris particles, thereby improving the operation stability and debris mitigation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a single pre laser pulse is applied to shape the target, then debris particle size is reduced, but the target shape repertoire is limited and conversion efficiency is sub-optimal
Solution Approach 1:
The single pre-pulse is segmented into multiple conditioning pulses (4-9 pulses) with time intervals of 200 ns or less. This segmentation allows progressive shaping of the target into complex geometries while maintaining debris mitigation benefits, overcoming the limitation of single-pulse shaping capability.
Solution Approach 2:
The invention employs periodic conditioning pulses at controlled intervals (≤200 ns) to progressively shape the target. This periodic action enables the system to achieve diverse target shapes with optimized debris properties, enhancing both adaptability and harmful factor reduction.
2Productivity
If multiple conditioning pulses are used to improve target shaping, then conversion efficiency improves, but device complexity increases
Solution Approach 1:
The conditioning pulses perform preliminary shaping of the target before the main laser pulse arrives. This preliminary action optimizes the target geometry for maximum conversion efficiency while keeping the main pulse simple, balancing complexity and performance.
Solution Approach 2:
The invention changes temporal parameters (pulse intervals ≤200 ns) and numerical parameters (4-9 pulses) to optimize the conditioning process. These parameter adjustments enable efficient target shaping without requiring complex device architecture, as the complexity is managed through parameter control rather than structural complexity.
3Stability of the object's composition
If the pulse sequence time intervals are extended, then target shaping stability improves, but debris particle size increases
Solution Approach 1:
The conditioning pulses perform preliminary shaping of the target before the main laser pulse arrives. This preliminary action optimizes the target geometry for maximum conversion efficiency while keeping the main pulse simple, balancing complexity and performance.
Solution Approach 2:
The invention changes temporal parameters (pulse intervals ≤200 ns) and numerical parameters (4-9 pulses) to optimize the conditioning process. These parameter adjustments enable efficient target shaping without requiring complex device architecture, as the complexity is managed through parameter control rather than structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively reduces debris particle size, enhances conversion efficiency, and improves the stability of the radiation source by shaping the target and deflecting debris, leading to improved performance in generating high-intensity electromagnetic radiation.
Implementation Method 1
at least one pulse sequence is directed to the target, wherein the pulse sequence comprises four to nine conditioning laser pulses
Implementation Method 2
a main laser pulse is directed to the target along a first axis, such that a radiation-emitting plasma is formed from at least a part of the target material
Implementation Method 3
a radiation-emitting plasma is formed from at least a part of the target material
Implementation Method 4
generating electromagnetic radiation, particularly high intensity radiation such as UV, extreme UV (EUV) or X-ray radiation
Data Source
AI summary
The invention relates to a method for generating electromagnetic radiation by a laser-produced plasma, wherein a target comprising a target material is provided, at least one pulse sequence is directed to said target, wherein the pulse sequence comprises four to nine conditioning laser pulses, wherein time intervals between subsequent conditioning laser pulses are 200 ns or less, and a main laser pulse is directed to said target along a first axis, such that a radiation-emitting plasma is formed from at least a part of said target material. The invention further relates to a device for generating electromagnetic radiation by means of a laser-produced plasma comprising a dispensing device and at least one laser source, wherein the device is configured such that at least one pulse sequence comprising four to nine conditioning laser pulses and a main laser pulse can be generated by the at least one laser source.