Unconfined Plasma Detection Sensor With Insulative Shielding
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Solution Overview
Problem
Current methods for detecting unconfined-plasma events in plasma processing systems are limited due to corrosion of sensor components, deposition of electrically insulating films, and poor signal-to-noise characteristics, leading to unreliable detection and potential damage to substrates and equipment.
Innovation Solution
A capacitive-based sensor system with electrically insulative outer layers and a detection circuit that converts transient currents into voltage signals, filters noise, and includes a shield to reduce electromagnetic interference, allowing for accurate and continuous detection of unconfined-plasma events without compromising equipment or substrate quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a sensor is placed inside the plasma chamber to detect unconfined-plasma events, then detection capability is improved, but sensor components corrode and electrically insulating films deposit on the sensor
Solution Approach 1:
The patent introduces an electrically insulative coating layer as an intermediary between the sensor components and the plasma environment. This coating acts as a protective mediator that prevents direct contact between the plasma and sensor components, thereby eliminating corrosion and film deposition while maintaining the sensor's ability to detect unconfined-plasma events through the non-conductive barrier.
Solution Approach 2:
The patent employs a sacrificial electrically insulative coating that can be easily replaced or re-applied. This disposable protective layer absorbs the environmental damage that would otherwise affect the expensive sensor components, allowing the coating to be periodically renewed while the core sensor remains intact and functional.
2Measurement precision
If conventional sensors are used in plasma environment, then detection is possible, but signal-to-noise characteristics deteriorate due to electromagnetic interference and environmental noise
Solution Approach 1:
The electrically insulative coating serves as an electromagnetic intermediary that blocks plasma-induced electromagnetic noise from reaching the sensor components. This coating acts as a shield that allows the sensor to detect plasma events while filtering out the noisy electromagnetic environment, thereby improving signal-to-noise characteristics.
Solution Approach 2:
The patent creates an electrically inert environment around the sensor components by surrounding them with the non-conductive coating. This inert protective environment isolates the sensor from the electrically active plasma, reducing electromagnetic interference and improving the quality of detection signals.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides a robust and clear signal for detecting unconfined-plasma events, reducing the risk of substrate damage and equipment failure while maintaining high manufacturing productivity with minimized design and maintenance costs.
Implementation Method 1
A capacitive-based sensor system with electrically insulative outer layers and a detection circuit that converts transient currents into voltage signals
Implementation Method 2
a detection circuit that converts transient currents into voltage signals, filters noise, and includes a shield to reduce electromagnetic interference
Implementation Method 3
includes a shield to reduce electromagnetic interference
Data Source
AI summary
A system for detecting unconfined-plasma events in a plasma processing chamber is disclosed. The system may include a sensor disposed in the plasma processing chamber for providing a current when unconfined plasma is present in the plasma processing chamber. The system may also include a converter for converting the current into a voltage and a filter for removing noise from the voltage to provide a first signal. The system may also include a detector for determining presence of the unconfined plasma using an amplified level of the first signal and/or the first signal. The system may also include a conductor for coupling the sensor and the converter to conduct the current from the sensor to the converter. The system may also include a shield for enclosing at least a portion of the conductor to at least reduce electromagnetic noise received by the conductor.