Plasma Generation Device Cooling Fluid Heat Recovery
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Solution Overview
Problem
Plasma generation devices face challenges in effectively cooling the heating caused by electric discharge while also needing to heat processing objects during plasma processing, requiring a solution that efficiently manages temperature and energy usage.
Innovation Solution
The plasma generation device incorporates a cooling section with a flow path for cooling the body section using a fluid that is warmed and then emitted together with plasma gas to heat the processing object, reducing energy requirements for heating the fluid and improving plasma processing efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a voltage is applied in the reaction chamber to generate electric discharge and convert processing gas into plasma, then plasma generation is achieved, but the reaction chamber is heated to a relatively high temperature
Solution Approach 1:
The patent converts the harmful heat generated by electric discharge in the reaction chamber into a beneficial resource by using it to preheat the cooling fluid before the fluid is used to heat the processing object. This transforms waste heat into useful thermal energy, reducing the overall energy consumption of the system.
Solution Approach 2:
The patent merges the cooling function and heating function into a single integrated system. The cooling fluid serves dual purposes: first cooling the reaction chamber by absorbing excess heat, then being redirected to heat the processing object. This combination eliminates the need for separate cooling and heating systems.
2Temperature
If a cooling section is used to cool the body section by using a fluid flowing in the flow path, then the plasma generation device is cooled, but additional energy is required to heat the fluid for processing object heating
Solution Approach 1:
The system performs preliminary heating of the cooling fluid by using the heat from the reaction chamber. Before the fluid is used to heat the processing object, it has already been preheated by absorbing thermal energy from the plasma generation process, reducing the additional energy needed for subsequent heating.
Solution Approach 2:
The heat generated by electric discharge, which would otherwise be waste energy requiring cooling, is converted into a beneficial resource by using it to preheat the cooling fluid. This transforms the harmful thermal energy into useful heat for processing object heating.
3Productivity
If the reaction chamber is heated by electric discharge, then plasma generation is improved, but the plasma generation device requires cooling
Solution Approach 1:
The cooling fluid serves multiple functions within the system: it cools the reaction chamber during plasma generation, then is heated and used to thermal process the processing object. This multi-functionality reduces the need for separate cooling and heating systems, simplifying the overall device architecture.
Solution Approach 2:
The patent combines the cooling system and heating system into a single integrated thermal management system. The same fluid circulation loop performs both cooling and heating functions, reducing system complexity compared to having separate independent systems for each function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for effective cooling of the plasma generation device and simultaneous heating of the processing object, enhancing plasma processing performance while minimizing energy consumption.
Implementation Method 1
a cooling section (27, 28) including a flow path (84), the cooling section being configured to cool the body section (30) by using a fluid flowing in the flow path
Implementation Method 2
an emission device (14) configured to heat the fluid used to cool the body section in the cooling section
Implementation Method 3
the heated fluid is emitted together with plasma gas onto a processing object
Implementation Method 4
a body section (30) including a reaction chamber (38) in which processing gas is converted into plasma by electric discharge
Data Source
AI summary
Atmospheric-pressure plasma generation device of the present invention includes heat sinks. Flow paths are formed in the heat sinks, and cooling gas flows in the flow paths, thereby cooling lower housing in which a reaction chamber is formed. Here, the gas used for cooling is warmed by the heat of the lower housing. The warmed gas is supplied into heated gas supply device and heated by heater. The heated gas flows in lower cover and is emitted together with plasma gas from lower cover toward a processing object. Consequently, it is possible to perform cooling of the lower housing heated by electric discharge and perform heating of the processing object, and it is possible to reduce energy required for heating gas.