Multi-Frequency Plasma Device Impedance Matching
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing devices for generating atmospheric plasma jets lack versatility in operating frequencies, limiting their ability to efficiently ignite and power plasma discharges across different frequency settings.
Innovation Solution
A device with a plasma source and radiofrequency power supply connected via a non-linear electrical component, such as a coil, that adapts impedance to match the power supply for multiple operating frequencies, allowing for the ignition of plasma discharges at various frequencies by perturbing the electromagnetic field within an enclosure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a plasma generating device uses a fixed impedance matching configuration for a single operating frequency, then the device can achieve optimal power transfer at that specific frequency, but the device lacks versatility to operate efficiently at multiple different frequencies
Solution Approach 1:
The patent implements a universal impedance matching network that can operate across multiple frequencies (13.56 MHz, 27.12 MHz, 40.68 MHz) using the same physical components. The enclosure with the coil creates a resonant system that naturally adapts to different frequencies through electromagnetic field perturbation, eliminating the need for frequency-specific matching circuits and enabling one device to serve multiple operational purposes
Solution Approach 2:
The impedance matching system employs dynamic characteristics through the enclosure-coil assembly that can adapt its electrical properties based on the operating frequency. The electromagnetic field within the enclosure interacts with the coil to provide frequency-dependent impedance transformation, allowing the system to dynamically match different plasma source impedances at different frequencies without manual reconfiguration
2Adaptability or versatility
If the electrical component is enclosed in a structure that perturbs the electromagnetic field for impedance adaptation, then the device achieves multi-frequency operation, but the enclosure adds structural complexity and potential interference
Solution Approach 1:
The enclosure serves multiple functions simultaneously: it provides mechanical support for the coil, defines the electromagnetic resonant cavity, and acts as part of the impedance matching network. This multi-functional design reduces the need for additional separate components and justifies the structural addition by eliminating other required elements
Solution Approach 2:
The coil is nested within the enclosure, creating a compact integrated structure where the electromagnetic field of the coil interacts with the enclosure boundaries. This nested configuration allows the enclosure to function as both a mechanical housing and an electrical component in the impedance matching network, reducing overall device complexity despite the added structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient power transfer and plasma discharge ignition across multiple frequencies, improving accessibility for diagnostics and allowing precise control of plasma characteristics, with over 75% power transfer efficiency and enhanced plasma control.
Implementation Method 1
designed to perturb an electromagnetic field generated by said electrical component in a manner that said impedance of the electrical component changes with the frequency of said voltage
Implementation Method 2
at least one radiofrequency power supply in electrical contact with said first electrode for applying a radiofrequency voltage thereto
Implementation Method 3
A plasma is an electrically quasi-neutral, ionized state of a gas, which is composed of ions, free electrons, and neutral species. For instance, such a plasma can be generated by coupling a radio frequency energy capacitively into a gas flow
Data Source
Figure 1
Figure 2
Figure 3
AI summary
The invention relates to a device (1) for generating a plasma, particularly an atmospheric plasma, comprising: a plasma source (100) having a first electrode (101) and optionally a second electrode (102) being arranged opposite the first electrode (101), and a volume (or channel) (103) arranged adjacent the first electrode (101) for receiving a gas (G), and at least one radiofrequency power supply (200) in electrical contact with said first electrode (101) for applying a radiofrequency voltage (V) thereto,. According to the invention, said at least one power supply (200) is in electrical contact with said first electrode (101) via an electrical component, particularly a coil (300), which component (300) provides an impedance for matching the impedance of the plasma source (100) to the impedance of the power supply (200), wherein said component (300) is arranged in an enclosure (400), which enclosure (400) encloses said component (300) and is designed to perturb an electromagnetic field generated by said component (300) in a manner that said impedance of the component (300) changes with the frequency of said voltage (V) such that the impedance of the plasma source (100) is adapted to the impedance of the power supply (200) for a plurality of different operating frequencies (fo) of said voltage (V), wherein said operating frequencies (fo) permit generating a plasma out of said gas (G) in said volume (or channel) (103) when said voltage (V) having the respective operating frequency (fo) is applied to the first electrode (101). Furthermore, the invention relates to a corresponding method for generating a plasma.