Atmospheric Pressure Plasma Device Gas Leakage Detection
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Solution Overview
Problem
Atmospheric pressure plasma devices face challenges in detecting pressure deviations in gas tubes and determining device states accurately, leading to issues with plasma generation and potential gas leakage detection.
Innovation Solution
An atmospheric pressure plasma device equipped with a pressure sensor to detect pressure changes in the gas tube and a determining section that assesses the device's state based on these deviations, allowing for the identification of gas leakage and other errors such as disconnection of gas tubes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a pressure sensor is used to detect pressure in the gas tube, then gas leakage and disconnection can be detected, but the device complexity increases
Solution Approach 1:
The pressure sensor is integrated into the existing gas supply system structure, combining the detection function with the gas tube assembly. This merging approach adds detection capability while minimizing the increase in overall device complexity by reusing existing structural elements.
Solution Approach 2:
The pressure sensor acts as an intermediary component between the gas supply system and the control section. It converts physical pressure changes into electrical signals that can be processed by the control section, enabling indirect detection of gas leakage and disconnection without requiring direct monitoring of the entire system.
2Loss of information
If pressure detection is implemented to determine device state, then plasma generation state can be monitored, but manufacturing precision requirements increase
Solution Approach 1:
The control section continuously monitors pressure sensor output and compares it against expected pressure ranges for different device states. This feedback mechanism allows the system to adapt to normal pressure variations while detecting abnormal conditions, reducing the stringency of manufacturing precision requirements by using dynamic thresholds rather than fixed precise values.
Solution Approach 2:
The system monitors changes in pressure parameters over time and compares them against predetermined standard values for different operational states. By focusing on parameter changes and trends rather than absolute precise measurements, the system can reliably determine device state without requiring extremely high manufacturing precision in the pressure sensing components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise determination of the plasma generation state and detects gas leakage by measuring pressure drops, ensuring stable plasma generation and immediate detection of abnormalities.
Implementation Method 1
a pressure sensor configured to detect a pressure in the gas tube
Implementation Method 2
a high-frequency electric power application unit for plasma generation that applies high-frequency electric power for plasma generation to at least one of upper electrode or the lower electrode
Data Source
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AI summary
It is desired to have an atmospheric pressure plasma device that detects the pressure in a gas tube using a pressure sensor, and determines the state of the device in accordance with the fact that the pressure in the gas tube deviates from a standard value. Disclosed is an atmospheric pressure plasma device including: a plasma head; a gas tube configured to supply a gas to the plasma head; a flow rate controller configured to control a flow rate of the gas supplied to the gas tube; a pressure sensor arranged downstream of the flow rate controller and configured to detect a pressure in the gas tube; and a determining section configured to determine a state of the device based on how the pressure in the gas tube deviates from a standard value specified for each flow rate of the supplied gas. As a result, it is possible to determine the gas leakage of the atmospheric pressure plasma device. Further, it is possible to determine whether plasma is being generated in a favorable state.