Plasma Processing Apparatus Dividing Wall Gap Adjustment
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Solution Overview
Problem
Plasma processing apparatuses face challenges in generating high-density plasma over a wide area for large workpieces, and the window member dividing the gas space in cylindrical members is prone to thermal deformation, leading to gap instability and potential damage.
Innovation Solution
A plasma processing apparatus with a cylindrical member and a dividing wall that separates from the rotator, featuring an adjustment opening to control plasma processing range, and a cooling system to prevent thermal deformation, ensuring precise gap adjustment and maintaining the integrity of the window member.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a cylindrical electrode is used to generate plasma for film processing, then plasma can be generated in the chamber, but it is difficult to generate high-density plasma in a wide range
Solution Approach 1:
The invention divides the plasma generation system into two independent parts: a cylindrical electrode for generating high-density plasma in a localized region, and a separate antenna for generating plasma in a wide area. This segmentation allows each component to optimize its function without compromising the other, resolving the contradiction between plasma density and plasma generation area.
Solution Approach 2:
The invention merges two different plasma generation methods (cylindrical electrode and antenna) into a single integrated system. The cylindrical electrode and antenna work together to provide both high-density plasma and wide-area plasma coverage, simultaneously achieving both improving and worsening features.
2Device complexity
If the window member is directly attached to the cylindrical member, then the structure is simple, but the window member is prone to thermal deformation and potential damage
Solution Approach 1:
The invention extracts the window member from direct contact with the cylindrical member that generates heat. By positioning the window member separately and using a non-contact support structure, the heat source is removed from the window member's environment, preventing thermal deformation while maintaining structural simplicity through the use of magnetic suspension or mechanical supports.
Solution Approach 2:
The invention introduces an intermediary support structure (such as a non-contact support using magnetic fields or a thermal isolation mechanism) between the cylindrical member and the window member. This intermediary protects the window member from thermal effects while maintaining the structural connection needed for the apparatus to function.
3Device complexity
If the gap between the cylindrical member and the rotation table is fixed, then the structure is simple, but the gap cannot be precisely adjusted for optimal processing
Solution Approach 1:
The invention transforms the fixed gap structure into a dynamic, adjustable gap structure. The support mechanism for the cylindrical member is designed to allow precise adjustment of the gap distance, enabling optimization of plasma processing parameters while maintaining operational flexibility.
Solution Approach 2:
The invention may replace complex mechanical adjustment mechanisms with alternative systems such as magnetic positioning or computer-controlled actuation, reducing mechanical complexity while achieving precise gap adjustment capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents thermal deformation of the window member and allows precise adjustment of the gap between the cylindrical member and the workpiece, ensuring stable plasma generation and processing efficiency for large workpieces.
Implementation Method 1
By applying a high frequency voltage to the antenna, plasma is generated in the gas space by inductive coupling
Implementation Method 2
a cooling system to prevent thermal deformation
Data Source
AI summary
A plasma processing apparatus includes a conveyance unit that has a rotator in a vacuum container, and circulating carries a workpiece by the rotator along a circular conveyance path, a cylindrical member extended in a direction toward the conveyance path in the vacuum container, a window member that divides a gas space where a process gas is introduced and an exterior, and an antenna causing the process gas to generate inductive coupling plasma for plasma processing when power is applied. The cylindrical member is provided with an opposing part with the opening and faces the rotator, a dividing wall is provided between the opposing part and the rotator so as not to contact the opposing part and the rotator and not to move relative to the vacuum container, and the dividing wall is provided with an adjustment opening that faces the opening, and adjusts a range of the plasma processing.