Cylindrical Drum Plasma Light Source Laser Damage Reduction

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Solution Overview

Problem

Plasma-based light sources face challenges in preventing laser-induced damage to the drum coated with Xenon ice, leading to stability degradation and contamination in the vacuum chamber due to high laser power density and particle propagation.

Innovation Solution

A plasma-based light source with a cylindrically-symmetric element coated with a band of plasma-forming target material, utilizing a system that outputs trimmed laser pulses with controlled intensity profiles and angles to reduce irradiation damage, and incorporating a pre-pulse and main pulse configuration to precondition the target material, along with a focusing unit to direct the laser beam to a waist at a distance from the surface, and grooved surface features to protect the target material.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If high laser power density is used to generate plasma from Xenon ice target material, then plasma generation efficiency and light output are improved, but laser-induced damage to the drum surface occurs leading to stability degradation and contamination

Engineering Contradiction:
Improvelaser power densityVSAvoidlaser-induced damage to drum surface
Core Design Contradiction:
PowerVSObject-affected harmful factors

Solution Approach 1:

A pre-pulse is applied before the main laser pulse to precondition the Xenon ice target material. This preliminary action creates an optimal plasma formation state that allows the main pulse to generate sufficient plasma with reduced peak power density, thereby preventing drum surface damage while maintaining plasma generation efficiency

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The laser system operates with periodic pulsed sequences consisting of pre-pulses followed by main pulses. This periodic action with controlled timing allows the target material to be prepared in each cycle, enabling sustained operation without cumulative damage to the drum surface

Inventive Principle:
Principle #19Periodic action

2Productivity

If the drum rotates at high speed to continuously present fresh target material, then target material replenishment is improved, but particle propagation and contamination in the vacuum chamber increase

Engineering Contradiction:
Improvetarget material replenishment rateVSAvoidparticle propagation and contamination
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The drum surface is designed with localized grooves that create specific interaction regions between the laser beam and target material. This local structural modification confines particle generation to specific zones, reducing overall particle propagation and contamination while maintaining effective target material presentation

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The grooved structure on the drum surface acts as an intermediary between the laser beam and target material. These grooves modify the plasma formation process and particle ejection patterns, serving as a mediator that reduces harmful particle propagation while maintaining target material effectiveness

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces laser-induced damage to the target material, enhances Xenon ice stability, and minimizes contamination, allowing for sustained operation and improved performance of the plasma-based light source.

Implementation Method 1

a target material is irradiated by an excitation source, such as a pulsed laser beam, in a vacuum chamber to produce plasma

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

light having the desired wavelength is emitted by plasma formed from a target material having an appropriate line-emitting or band-emitting element

Methodology Applied
Scientific EffectLuminescence: Luminescence

Data Source

PatentUS9918375B2Plasma based light source having a target material coated on a cylindrically-symmetric element
Publication Date: 2018.03.13 KLA CORP
  • US9918375B2 patent drawing
  • US9918375B2 patent drawing
  • US9918375B2 patent drawing

AI summary

The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a cylindrically-symmetric element (e.g., drum). Embodiments include a pre-pulsing arrangement which can be optimized to reduce irradiation damage to the drum and a pulse trimming unit which can be employed to reduce irradiation damage to the drum. In addition, an embodiment is disclosed wherein the surface of a cylindrically-symmetric element is formed with a plurality of grooves having a groove depth greater than 1 mm and a focusing unit focusing a laser beam and establishing an irradiation site to produce plasma from the target material, with the irradiation site distanced from a groove surface portion to protect the surface portion from irradiation damage.