Vertical Fastener Assembly for Plasma Electrode Thermal Stress
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Solution Overview
Problem
Existing fastener assemblies for coupling the upper electrode of a plasma chamber face issues such as bolt damage, gap formation due to loosening, performance degradation, fall risk, and maintenance difficulties, especially under rapid temperature changes and vacuum conditions.
Innovation Solution
A vertical fastener assembly comprising a vertical shaft, rotating unit, stress releasing pin, elastic unit, and pin housing, allowing for vertical fastening and stress absorption, with a design that includes a coupling tap and elastic unit to manage deformations and facilitate easy maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a threaded portion is fastened directly by a bolt, then the fastening is simple, but the threaded portion may be damaged due to fastening force
Solution Approach 1:
A separate coupling member is introduced as an intermediary between the bolt and the threaded portion of the upper electrode. The coupling member has a first coupling portion that receives the bolt and a second coupling portion that engages with the threaded portion, distributing the fastening force and preventing direct damage to the threaded portion while maintaining simple fastening operation.
2Device complexity
If a bolt fastening is used, then the structure is simple, but a gap may be created by loosening due to temperature changes
Solution Approach 1:
The coupling member is designed with a movable structure that allows it to dynamically adjust its position and engagement force in response to temperature changes and thermal expansion. This dynamic adaptation maintains stable coupling between the upper electrode and the chamber body under varying thermal conditions without requiring complex fastening mechanisms.
3Adaptability or versatility
If a connecting member extends in diameter for clamping, then lateral fastening is achieved, but vertical direction fastening is impossible
Solution Approach 1:
The coupling member transitions from a horizontal/diameter-direction clamping structure to a vertical orientation. The first coupling portion connects vertically to the bolt from above, and the second coupling portion engages vertically with the threaded portion, enabling fastening in the vertical direction while maintaining structural effectiveness.
4Productivity
If frequent cleaning and exchanging is needed, then maintenance is required, but by-products may get caught between structures
Solution Approach 1:
The coupling system is segmented into separable components: the upper electrode with its threaded portion, the removable coupling member, and the chamber body. This segmentation allows the upper electrode and coupling member to be easily detached as a unit for cleaning and maintenance, preventing by-product accumulation between structures while enabling frequent servicing without complex disassembly procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances coupling stability, absorbs thermal stress, and facilitates easy assembly and maintenance by allowing vertical fastening, thereby maintaining etching process performance and preventing falls.
Implementation Method 1
an elastic unit coupled to a lower part of the stress releasing pin
Data Source
AI summary
A vertical fastener assembly for coupling an upper electrode of a plasma chamber comprises a vertical shaft extending in a vertical direction and coupled to the upper plate; a rotating unit coupled to an upper part of the vertical shaft and moving the vertical shaft up and down; a stress releasing pin coupled to the upper electrode and coupled to the vertical shaft in a removal way; an elastic unit coupled to a lower part of the stress releasing pin; and a pin housing coupled to an upper part of the stress releasing pin.