Plasma Filter Unit Comb Teeth and Coils
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Solution Overview
Problem
In capacitively coupled plasma processing apparatuses, existing filters struggle to effectively block multiple high-frequency noises of different frequencies introduced into heater power feed lines, leading to increased power loss and difficulty in matching resonance frequencies, which affects the reproducibility and reliability of the plasma process.
Innovation Solution
A plasma processing apparatus with a filter unit that includes an air-core solenoid coil and a troidal coil, combined with a distributed constant line, to block high-frequency noises of different frequencies, where the air-core solenoid coil blocks higher frequencies and the troidal coil blocks lower frequencies, with adjustable winding pitches and comb teeth to ensure high reproducibility and efficient heat dissipation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single air-core solenoid coil is used to block high frequency noises, then the filter structure is simple, but it cannot effectively block multiple high frequency noises of different frequencies simultaneously
Solution Approach 1:
The filter is divided into multiple independent coil units (first coil unit with air-core solenoid coil, second coil unit with troidal coil), each responsible for blocking specific frequency ranges. This segmentation allows each coil to be optimized for particular frequencies while maintaining overall structural simplicity.
Solution Approach 2:
Different coil configurations (air-core solenoid vs. troidal) and winding pitches are used to change the electrical parameters of each coil unit, enabling them to resonate at different frequencies and effectively block multiple high frequency noises simultaneously.
2Adaptability or versatility
If the winding pitch of the air-core solenoid coil is increased to block higher frequencies, then the filter can block a broader frequency range, but the heat dissipation performance deteriorates
Solution Approach 1:
The coil structure is designed with non-uniform winding pitch where different sections have different pitch values. Sections with smaller winding pitches are positioned where heat dissipation is critical, while sections with larger pitches target specific high frequency ranges, creating local optimization of both frequency blocking and thermal performance.
3Reliability
If multiple coils are added to block different frequencies, then the noise blocking effectiveness is improved, but the device complexity increases
Solution Approach 1:
Multiple coil units are merged into a single integrated filter structure with shared magnetic cores and combined winding arrangements. The first and second coil units are positioned adjacently and electrically connected, reducing the need for separate housings and mounting structures, thereby limiting the increase in overall device complexity.
4Reliability
If the filter is designed to block low frequency noises, then comprehensive noise blocking is achieved, but the resonance frequency matching becomes more difficult
Solution Approach 1:
The filter design incorporates adjustable parameters such as winding pitch and coil turns that can be dynamically modified during manufacturing to tune the resonance frequencies. This dynamic adjustability simplifies the matching process for blocking low frequency noises while maintaining comprehensive noise blocking capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution improves the reproducibility and reliability of the plasma process by applying sufficient impedance to high-frequency noises, reducing power loss, and allowing for flexible frequency matching, thus enhancing the control of the plasma process.
Implementation Method 1
configured to form, by being combined with the air-core solenoid coil, a distributed constant line in which parallel resonance occurs at multiple frequencies
Implementation Method 2
an air-core solenoid coil... configured to block noises of a single or plural high frequency powers
Implementation Method 3
a troidal coil... configured to block noises of a high frequency power having a lowest frequency among frequencies of the multiple high frequency powers
Implementation Method 4
a heating element that generates heat by an electric current applied thereto is provided in the susceptor, and Joule heat generated by the heating element is controlled
Data Source
AI summary
A filter unit 54(IN) includes a housing 82 formed of a cylindrical conductor. Further, in the housing 82, the air-core solenoid coils AL1 and BL1; the first capacitors AC1 and BC1; the troidal coils AL2 and BL2; and the second capacitors AC2 and BC2 are arranged in this sequence from top to bottom. In the vicinity of the air-core solenoid coils AL1 and BL1, a multiple number of rod-shaped comb-teeth members 86, which are extended in parallel to a coil axis direction, are provided adjacent to outer peripheries of the air-core solenoid coils AL1 and BL1 at a regular interval in a circumferential direction thereof. A comb teeth M are formed on an inner surface of each comb-teeth member 86, and the comb teeth M are inserted into winding gaps of the air-core solenoid coils AL1 and BL1.