Plasma Chamber Fixture With Ball Lock for Fast Member Assembly
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Solution Overview
Problem
Existing plasma processing apparatuses face challenges in efficiently and easily attaching and detaching structural members, leading to increased assembly time and maintenance complexity due to the use of fasteners.
Innovation Solution
A fixture system is introduced that includes a male and female member configuration with a movable holding member and spherical members guided by a tapered portion, allowing for secure attachment and detachment of structural members without fasteners, using fluids or mechanical mechanisms for movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If fasteners are used to attach structural members, then structural integrity is ensured, but assembly time and maintenance complexity increase
Solution Approach 1:
The invention extracts and eliminates fasteners from the attachment system between the electrostatic chuck and mounting plate, and between the stage and support member. By removing these fastening components entirely, the patent achieves both structural integrity through direct bonding and dramatically reduces assembly time by eliminating fastener installation and removal steps.
Solution Approach 2:
The invention merges the attachment function into the structural members themselves through direct bonding. The electrostatic chuck is directly bonded to the mounting plate, and the stage is directly bonded to the support member, combining the structural and attachment functions into unified components rather than separate fastened parts.
2Strength
If fasteners are used to attach structural members, then structural integrity is ensured, but maintenance complexity increases
Solution Approach 1:
By extracting fasteners from the system, the invention eliminates the complexity associated with fastener maintenance, inspection, and replacement. The direct bonding structure simplifies maintenance procedures while maintaining structural integrity through the bonded joints.
3Reliability
If multiple fasteners are used to attach members, then secure attachment is achieved, but device complexity increases
Solution Approach 1:
The invention extracts multiple fasteners from the attachment system and replaces them with direct bonding. This reduction in component count simplifies the device structure while maintaining secure attachment through the bonded joints between structural members.
4Adaptability or versatility
If fasteners are used for attachment, then detachable connection is achieved, but productivity decreases due to increased work steps
Solution Approach 1:
By extracting fasteners and implementing direct bonding with detachable mechanisms, the invention achieves detachable connection capability while reducing the number of work steps. The bonded structure allows for easier and faster attachment and detachment operations compared to traditional fastener systems.
Data Source
AI summary
A plasma processing apparatus includes a chamber, a first member, a second member, and a fixture that detachably fixes the first member and the second member along an axial direction. The fixture includes a male member fixed to the first member, and a female member fixed to the second member and receiving the male member. The male member includes a shaft member extending in the axial direction and having an enlarged diameter at a tip thereof. The female member includes an accommodation member fixed to the second member, a holding member disposed within the accommodation member, and a spherical member held by the holding member. The spherical member moves inward in a radial direction by being guided by a tapered portion of an inner wall of the accommodation member when the holding member moves in a first direction, which is the axial direction toward an opening.