Plasma Power Frequency Retrieval With Low-Delay Local Sensing
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Solution Overview
Problem
Existing plasma processing tools face challenges in accurately determining the frequency of power supplied to plasma sources with existing frequency detection systems, which are prone to delays due to the need for messaging and information passing across dynamic systems.
Innovation Solution
A semiconductor processing tool equipped with a transmission line sensor, analog to digital converter, digital down converter, frequency digital phase lock loop, and transmission line scaling module, allowing for autonomous frequency detection with minimal group delay and optimal control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If messaging or information passing is used to determine frequency from power supply to load, then frequency information can be obtained, but large group delays occur between actuator control and feedback
Solution Approach 1:
The patent extracts the frequency detection function from the centralized control system and places it directly at the load end through an autonomous frequency detection circuit. This circuit independently measures the frequency of the power signal applied to the plasma source without requiring communication with the power supply controller, thereby eliminating messaging delays while maintaining accurate frequency measurement.
Solution Approach 2:
The load end system performs self-service by autonomously detecting its own operating frequency using local sensors and signal processing circuits. This self-detection capability eliminates the need for external frequency information from the power supply side, removing the dependency on inter-system messaging and the associated group delays.
2Measurement precision
If messaging and information passing are implemented across dynamic systems, then frequency feedback can be provided, but system complexity increases
Solution Approach 1:
The patent extracts the frequency detection functionality from the complex inter-system communication architecture and consolidates it into a simple autonomous circuit at the load end. This eliminates the need for messaging protocols, information passing interfaces, and associated control software, thereby reducing system complexity while maintaining accurate frequency feedback.
Solution Approach 2:
The autonomous frequency detection circuit at the load end serves multiple functions: it measures frequency, provides real-time feedback, and enables dynamic control adjustments all within a single integrated system. This multi-functionality eliminates the need for separate communication channels and control loops, simplifying the overall system architecture.
3Loss of information
If point-to-point network connections are used for frequency identification, then information can be transmitted, but large group delays occur between actuator control and feedback
Solution Approach 1:
The patent introduces an intermediary autonomous frequency detection circuit at the load end that locally measures frequency without requiring communication with the power supply controller. This intermediary eliminates the need for point-to-point network connections and the associated transmission delays, providing instantaneous frequency feedback for dynamic control.
Data Source
AI summary
Embodiments disclosed herein include a processing tool. In an embodiment the processing tool comprises a transmission line sensor, and an analog to digital (A/D) converter. In an embodiment, the processing tool may further comprise a digital down converter (DDC), and a frequency digital phase lock loop (dPLL). In an embodiment, the processing tool may further comprise a transmission line scaling module.