Plasma Generation System Gas Delivery Network
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Solution Overview
Problem
Existing gas delivery devices for plasma chambers fail to achieve uniform gas distribution over a wide dimension, leading to delays in gas delivery timing and non-uniform plasma density, especially in elongated plasma chambers used in large-scale semiconductor manufacturing.
Innovation Solution
A gas delivery device with a network of paths featuring a branch point connected to an input node and multiple output nodes offset along the longitudinal axis, ensuring simultaneous and uniform gas distribution to the plasma chamber via multiple output ports aligned along the elongated side wall.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If existing gas delivery devices are used to deliver gas to elongated plasma chambers, then gas can be delivered to the chamber, but uniform gas distribution over wide dimensions cannot be achieved due to large differences in gas distribution line lengths
Solution Approach 1:
The gas delivery device divides the plasma chamber into multiple zones along the longitudinal axis, with separate gas distribution lines for each zone. This segmentation allows independent control and optimization of gas delivery to different sections, enabling uniform gas distribution across the entire elongated chamber despite varying distances from the gas source.
Solution Approach 2:
The patent implements zone-specific gas distribution where each section of the plasma chamber receives gas through dedicated lines with optimized path lengths. This local quality approach ensures that gas delivery characteristics are tailored to each zone's specific requirements, achieving uniformity across the whole chamber by addressing local delivery conditions.
2Loss of time
If gas distribution line lengths are made equal to achieve uniform delivery timing, then delivery timing uniformity improves, but the device cannot accommodate elongated plasma chambers with wide dimensions
Solution Approach 1:
The gas delivery system is segmented into multiple independent lines, each serving a specific zone of the plasma chamber. This segmentation allows the system to accommodate elongated chambers by providing dedicated gas delivery paths to different sections, maintaining timing synchronization without requiring all lines to be equal in length.
Solution Approach 2:
The patent transitions from a single-dimension gas delivery approach to a multi-dimensional network of gas distribution lines. By introducing multiple spatial dimensions for gas delivery paths, the system can accommodate the three-dimensional geometry of elongated plasma chambers while maintaining uniform gas distribution and timing across all zones.
Data Source
AI summary
A plasma generation system is provided that includes an elongated plasma chamber having a first elongated side wall substantially parallel to a longitudinal axis extending through the plasma chamber and a gas delivery device for delivering a gas to the plasma chamber via the first elongated side wall. The gas delivery device includes at least one input port for receiving a source of the gas and a plurality of output ports for delivering portions of the gas to the plasma chamber. The gas delivery device also includes a network of gas delivery paths comprising at least one branch point between the at least one input port and the plurality of output ports. The at least one branch point is directly connected to (i) an input node and (ii) at least two output nodes that are positioned offset from the branch point along the longitudinal axis.