Dual-Spectrum Plasma Gas Analysis for Real-Time Precision
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current gas analyzer apparatuses face challenges in achieving stable and accurate detection of components in sample gases, particularly in semiconductor manufacturing, where complex processes require real-time monitoring and high precision, and existing technologies struggle with spectral interference and limited throughput.
Innovation Solution
A gas analyzer apparatus with a dielectric wall structure that generates plasma using an electric and/or magnetic field, incorporating both mass spectrometry and optical emission spectrometry detectors to analyze the same plasma simultaneously, allowing for synchronized detection results and enhanced accuracy by comparing serial and parallel data sets.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If mass spectrometry is used for gas component detection, then detection accuracy is improved, but detection speed decreases due to serial time-division acquisition
Solution Approach 1:
The detection system is segmented into two independent detection channels: mass spectrometry detection and optical emission spectrometry detection. Each channel operates independently with its own detection mechanism, allowing parallel acquisition of different types of spectral data from the same plasma source without interfering with each other's speed or accuracy.
Solution Approach 2:
The patent merges mass spectrometry detection and optical emission spectrometry detection into a single integrated system that analyzes the same plasma source simultaneously. By combining these two detection methods with different acquisition speeds, the system achieves both high accuracy (from mass spectrometry) and high speed (from optical emission spectrometry) in gas component analysis.
2Productivity
If optical emission spectrometry is used for parallel detection, then detection speed is improved, but spectral interference increases
Solution Approach 1:
The system uses feedback by comparing and correlating data from both detection channels. The slow but accurate mass spectrometry data provides a reference that helps identify and correct spectral interferences in the fast optical emission spectrometry data, ensuring high speed detection maintains high accuracy through cross-validation.
Solution Approach 2:
The detection approach uses a composite strategy combining two different detection methodologies (mass spectrometry and optical emission spectrometry) with complementary strengths. This composite detection system leverages the high accuracy of mass spectrometry and the high speed of optical emission spectrometry to overcome the limitations of each individual method.
3Measurement precision
If serial time-division detection is used, then detection accuracy is improved, but real-time monitoring capability deteriorates
Solution Approach 1:
The monitoring system is segmented into parallel detection channels that simultaneously capture different aspects of plasma composition. This segmentation allows real-time monitoring through the fast optical emission channel while maintaining high accuracy through the mass spectrometry channel, eliminating the time delays inherent in serial detection.
Solution Approach 2:
The system maintains continuous useful action by having both detection channels operate simultaneously and continuously. The optical emission spectrometry provides continuous real-time data for immediate monitoring, while mass spectrometry continuously provides high-accuracy reference data, ensuring both real-time capability and detection accuracy are maintained without interruption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables more reliable and accurate analysis by synchronizing mass spectra with optical emission spectra, reducing spectral interference and improving real-time monitoring capabilities, thus enhancing the precision and reliability of gas component detection.
Implementation Method 1
a plasma generation mechanism that is configured to generate a plasma in the sample chamber, which has been depressurized, using an electric field and/or a magnetic field through the dielectric wall structure
Implementation Method 2
a plasma generation mechanism that is configured to generate a plasma in the sample chamber, which has been depressurized, using an electric field and/or a magnetic field through the dielectric wall structure
Implementation Method 3
a first detector that is configured to detects components in the plasma by filtered ionized gas from the generated plasma
Implementation Method 4
a second detector that is configured to analyze emission (light emission) of ions in the plasma inside the sample chamber
Data Source
AI summary
A gas analyzer apparatus includes: a sample chamber that is provided with a dielectric wall structure and into which a sample gas to be measured flows; a plasma generation mechanism for generating plasma inside the sample chamber, which has been depressurized, using an electric field and/or a magnetic field through the dielectric wall structure; a gas input apparatus configured to cause only the sample gas to flow from a process into the sample chamber; a first detector configured to detect components in the plasma by filtered ionized gas from the generated plasma; and a second detector configured to analyze light emission of ions in the plasma inside the sample chamber and output a second detection result that is to be synchronized with the first detection result of the first detector.