Plasma Gas Injector with Segmented Nozzles for Uniform Dispersion
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Solution Overview
Problem
Existing plasma processing apparatuses face challenges in achieving uniform dispersion of process gases within the chamber, leading to inefficient semiconductor processes and product yield issues.
Innovation Solution
A plasma processing apparatus design featuring a window plate with a fastening hole of varying widths and a gas injector with a two-piece structure, including distribution nozzles and injection nozzles, which creates a gap and gas holes to uniformly distribute and inject process gases, enhancing mixing and preventing particle deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional gas injector design is used, then the structure is simple, but uniform dispersion of process gas inside the chamber cannot be achieved
Solution Approach 1:
The gas injector is divided into multiple functional components: a first gas injector with distribution nozzles for distributing process gas, and a second gas injector with injection nozzles for injecting the distributed gas. This segmentation allows each component to perform its specific function optimally, achieving uniform gas dispersion while maintaining reasonable structural complexity through modular design.
Solution Approach 2:
Different regions of the gas injector system are designed with different properties: the first body contains distribution nozzles with specific configurations for gas distribution, while the second body contains injection nozzles with different configurations for gas injection. The window plate also features a fastening hole with varying width (narrower at the bottom, wider at the top) to optimize gas flow characteristics in different regions, achieving uniform dispersion through localized optimization.
2Ease of repair
If the gas injector components are integrated into a single unit, then manufacturing is simpler, but maintenance and replacement become more difficult
Solution Approach 1:
The gas injector system is segmented into replaceable modules: the first gas injector (with distribution nozzles) and the second gas injector (with injection nozzles). The second gas injector, which is exposed to plasma and requires frequent replacement, can be independently removed and replaced without replacing the entire system. This modular segmentation significantly improves ease of repair while maintaining manageable device complexity.
3Manufacturing precision
If the fastening hole has uniform width, then manufacturing is easier, but gas flow distribution becomes non-uniform
Solution Approach 1:
The fastening hole in the window plate is designed with non-uniform width: narrower at the bottom portion and wider at the top portion. This local variation in geometry is optimized to compensate for pressure gradients and flow characteristics at different heights, achieving uniform gas flow distribution throughout the chamber. While slightly more complex to manufacture than a uniform hole, the design remains feasible using standard machining processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design ensures uniform gas dispersion and improved mixing within the chamber, increasing product yields and reducing maintenance costs by allowing separate replacement of components exposed to plasma.
Implementation Method 1
a first body having a plurality of distribution nozzles configured to distribute process gas
Implementation Method 2
a plurality of injection nozzles configured to inject the process gas distributed by the plurality of distribution nozzles into an internal space of the chamber
Implementation Method 3
the second portion of the second body includes a gas hole extending from the accommodating groove to an external side surface of the second portion of the second body
Data Source
AI summary
A plasma processing apparatus includes a chamber; a support member in the chamber; a window plate at an upper portion of the chamber and including a window plate body and a fastening hole, wherein the fastening hole includes a lower fastening hole portion and an upper fastening hole portion. and a gas injector including a first body having a plurality of distribution nozzles and a second body having an accommodating groove to which the first body is fastened and a plurality of injection nozzles. The second body includes a first portion disposed inside the upper fastening hole portion, a second portion disposed inside the lower fastening hole portion, and a third portion disposed below the window plate. The second portion of the second body includes a gas hole extending from the accommodating groove to an external side surface of the second portion of the second body.