Plasma Gas Monitoring with Spectral Correction for Quantitative Sensing
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Solution Overview
Problem
Existing remote optical emission spectroscopy methods provide qualitative, rather than quantitative, gas concentration readings in partially-evacuated atmospheres due to gas interactions, leading to skewed measurements when multiple species are present.
Innovation Solution
A method that corrects for gas interaction effects by formulating a relationship between gas concentrations using linear coefficient-type equations, allowing for quantitative gas concentration measurements through calibration procedures and total pressure measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Difficulty of detecting and measuring
If remote optical emission spectroscopy is used to monitor gas concentrations in partially-evacuated atmospheres, then gas detection capability is provided, but measurement precision deteriorates due to gas interactions causing skewed readings
Solution Approach 1:
The system continuously monitors gas concentrations and uses feedback loops to adjust measurements in real-time, compensating for gas interaction effects by comparing expected versus actual emission intensities and iteratively refining concentration readings
Solution Approach 2:
The invention changes the measurement parameters by using multiple wavelengths and comparing relative emission intensities across different spectral lines. By analyzing ratios of emission intensities at different wavelengths rather than absolute intensities, the system compensates for gas interaction effects that affect all species similarly
2Measurement precision
If complex pumping systems are added to improve measurement accuracy, then measurement precision improves, but device complexity increases
Solution Approach 1:
The invention replaces mechanical pumping systems with a computational approach. Instead of using additional pumps to physically remove interfering gases, the system uses mathematical models and algorithms to compensate for gas interaction effects in the spectral data, achieving accurate measurements without mechanical intervention
Solution Approach 2:
The invention introduces computational algorithms as an intermediary between the raw spectral data and the final concentration readings. These algorithms act as a mediator that processes the skewed measurements and converts them into accurate concentration values, eliminating the need for physical intervention systems
3Measurement precision
If additional pumping systems are implemented to resolve gas interaction issues, then measurement precision improves, but loss of energy increases
Solution Approach 1:
The invention replaces energy-intensive mechanical pumping systems with computational processing. By using algorithms to correct for gas interaction effects rather than physically removing interfering gases, the system eliminates the continuous energy consumption required to operate additional pumps
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate, real-time quantitative gas concentration measurements in partially-evacuated atmospheres, eliminating the need for complex and error-prone additional pumping systems and reducing operational costs.
Implementation Method 1
a plasma source (18) which generates plasma in a partially-evacuated atmosphere
Implementation Method 2
Remote optical emission spectroscopy is an example of a gas sensing technique, which can be used to detect and monitor the concentrations of gases present in an environment
Data Source
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AI summary
The actual concentration, or partial pressure (58), of a target gas species in a partially-evacuated atmosphere (10) containing several gas species can be ascertained by generating a plasma (21) and by measuring (20) the intensity (24) of light emissions from the plasma (21) at characteristic emission wavelengths. The total gas pressure is measured with a total pressure gauge (17), and the relative intensities (24) of the light emissions are dependent on the said actual concentration or partial pressure (58). An equation is used, which compensates for variations in apparent emission intensity (24) arising from interactions between the different gas species. The system (100) can be used at higher pressures than known gas monitoring systems, thus reducing the need for complex vacuum systems (52).