Plasma Generating Apparatus Droplet Removal Path
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Solution Overview
Problem
Conventional plasma arc processing apparatuses face issues with droplets generated during vacuum arc discharge contaminating the plasma stream, leading to non-uniform film formation and surface treatment defects due to incomplete droplet removal, especially with small grain diameter and electrically charged droplets.
Innovation Solution
A plasma generating apparatus with a droplet removing section featuring a plasma advancing path comprising a series of bent tubes, including a plasma advancing tube, a first bent tube, a second inclined tube, and a third bent tube, along with magnetic field coils and droplet collecting plates, to effectively remove cathode material particles and improve plasma purity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional plasma arc processing apparatus is used, then plasma is generated for surface treatment, but droplets contaminate the plasma stream causing non-uniform film formation and surface defects
Solution Approach 1:
The plasma advancing path is segmented into multiple sections with different orientations (horizontal, inclined, vertical). This segmentation allows droplets to be separated from the plasma stream at different stages, with each segment serving a specific droplet removal function while maintaining plasma flow.
Solution Approach 2:
The plasma advancing path uses curved and inclined tubes instead of straight connections. The curved path causes plasma to flow along the tube wall, allowing droplets to settle on the tube surface due to gravity and centrifugal effects, while the plasma continues along the curved path to the processing chamber.
2Productivity
If the plasma advancing path is shortened to improve productivity, then film formation rate increases, but droplet removal efficiency decreases
Solution Approach 1:
The plasma advancing path transitions from a two-dimensional horizontal layout to a three-dimensional structure with inclined and vertical sections. This dimensional change allows the path to be more compact in horizontal space while providing sufficient length for droplet removal through gravitational settling in the vertical direction.
Solution Approach 2:
The plasma advancing path uses asymmetric tube orientations with specific inclination angles (e.g., 45 degrees) rather than symmetric horizontal or vertical arrangements. This asymmetric design optimizes the balance between plasma transport efficiency and droplet removal effectiveness in a compact configuration.
3Speed
If magnetic field coils are added to improve plasma transport, then plasma flow efficiency increases, but device complexity increases
Solution Approach 1:
The magnetic field coils serve multiple functions: they generate magnetic pressure to drive plasma flow forward, confine the plasma stream within the tube, and prevent droplet re-entrainment into the plasma flow. This multi-functionality reduces the need for additional separate components.
Solution Approach 2:
The magnetic field replaces mechanical pumping or forcing mechanisms to transport plasma. The magnetic pressure gradient drives plasma flow through the advancing path without requiring mechanical moving parts, reducing device complexity while maintaining efficient plasma transport.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances droplet removal efficiency, resulting in improved film formation precision and surface treatment quality by maintaining high plasma purity and reducing droplet contamination, achieving film formation rates suitable for semiconductor substrates.
Implementation Method 1
generates plasma from a target surface by a vacuum arc discharge
Implementation Method 2
a magnetic field is formed by magnets arranged along the duct. The plasma stream is bent by this curve magnetic field
Implementation Method 3
the droplets which were generated are adhered and captured (collected) on the duct inner circumferential wall
Implementation Method 4
a curved magnetic field is formed by magnets arranged along the duct. The plasma stream is bent by this curve magnetic field
Implementation Method 5
The plasma stream is bent by this curve magnetic field, and it is configured so that the plasma is guided efficiently
Data Source
AI summary
A plasma processing apparatus using a plasma generating apparatus by which droplets mixed in plasma can be efficiently removed and surface processing precision can be improved in film formation wherein high purity plasma is used. A droplet removing portion arranged in a plasma advancing path is composed of a straight plasma advancing tube (P0) connected to a plasma generating portion (A); a first plasma advancing tube (P1) connected to the straight plasma advancing tube (P0) in a bent manner; a second plasma advancing tube (P2) connected to a finishing end of the first plasma advancing tube (P1) by being inclinedly arranged at a predetermined inclination angle with respect to the tube axis of the first plasma advancing tube; and a third plasma advancing tube (P3), which is connected to the finishing end of the second plasma advancing tube (P2) in a bent manner and discharges plasma from a plasma outlet.