Plasma Generation Apparatus Parallel Capacitor Impedance

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional plasma generation methods for toroidal plasmas require high electric power to generate a high-frequency electric field, which can damage power source circuits and are not cost-effective, especially since they often necessitate specialized chamber designs or components used only briefly for plasma ignition.

Innovation Solution

A plasma generation apparatus with a toroidal-shaped electric discharge space, a high-frequency power source, a magnetic field generator, and a parallel capacitor connected in parallel to the magnetic field generator, allowing for the generation of a sufficient high-frequency electric field at low electric power by maximizing impedance and using a commercially available high-frequency power source.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If high electric power is applied to generate a high-frequency electric field for plasma ignition, then plasma ignition is achieved, but the power source circuit may be damaged

Engineering Contradiction:
Improveelectric power for plasma ignitionVSAvoidpower source circuit reliability
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The invention changes the impedance parameter of the magnetic field generator by connecting a parallel capacitor, thereby changing the relationship between voltage and current. This allows high voltage to be applied with low current, achieving plasma ignition without damaging the power source circuit

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

A parallel capacitor is introduced as an intermediary component between the power source and the magnetic field generator. This capacitor modifies the electrical characteristics, enabling high voltage application while limiting current flow to safe levels for the power source circuit

Inventive Principle:
Principle #24Intermediary (Mediator)

2Power

If conventional plasma generation methods are used, then plasma ignition is achieved, but specialized chamber designs or additional components are required

Engineering Contradiction:
Improveplasma ignition capabilityVSAvoidchamber structure complexity
Core Design Contradiction:
PowerVSDevice complexity

Solution Approach 1:

The parallel capacitor configuration allows the existing inductive coil to serve dual purposes: as the magnetic field generator during normal operation and as the plasma ignition mechanism. This eliminates the need for separate ignition electrodes or specialized chamber designs

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The existing inductive coil structure serves itself for plasma ignition by connecting the parallel capacitor to it. The coil无需 any modification or additional components can achieve plasma ignition through the impedance transformation provided by the parallel capacitor

Inventive Principle:
Principle #25Self-service

3Use of energy by moving object

If high current flows through the high-frequency power source circuit to provide required power, then sufficient electric field is generated, but the power source circuit is damaged

Engineering Contradiction:
Improveenergy delivery to plasmaVSAvoidpower source circuit integrity
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The parallel capacitor changes the electrical parameters by creating a resonant circuit that transforms the current draw characteristics. The circuit operates at a frequency where the capacitive reactance and inductive reactance balance, allowing high voltage with low current draw from the power source

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus effectively generates a high-frequency electric field necessary for plasma ignition using low electric power, reducing the risk of power source damage and eliminating the need for specialized components, thus enhancing efficiency and cost-effectiveness.

Implementation Method 1

since there is a capacitor (parallel capacitor) connected in parallel to the magnetic field generator, the impedance of the load viewed from the high-frequency power source is high

Methodology Applied
Scientific EffectImpedance maximization through parallel resonance: Resonance

Implementation Method 2

a parallel capacitor connected in parallel to the magnetic field generator

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 3

a magnetic field generator that generates a high-frequency magnetic field upon flowing of the high-frequency current therethrough

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 4

generates a high-frequency magnetic field by a high-frequency current flowing in an induction coil, and the resulting magnetic field in turn generates a high-frequency electric field in the chamber for producing a plasma

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Data Source

PatentUS10306744B2Plasma generation apparatus and high-frequency power source
Publication Date: 2019.05.28 DAIHEN CORP
  • US10306744B2 patent drawing
  • US10306744B2 patent drawing
  • US10306744B2 patent drawing

AI summary

A plasma generation apparatus includes a chamber, a high-frequency power source, a magnetic field generator and a parallel capacitor. The chamber has an inner, toroidal-shaped electric discharge space. The high-frequency power source outputs a high-frequency current to the magnetic field generator, which generates a high-frequency magnetic field upon flowing of the high-frequency current therethrough. The parallel capacitor is connected in parallel to the magnetic field generator.