Plasma Chamber Separation Grid for Hydrogen Radical Delivery
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Solution Overview
Problem
Existing plasma processing equipment faces challenges in maintaining and delivering hydrogen radicals effectively due to recombination with the equipment surfaces, leading to reduced availability and efficiency in processing workpieces.
Innovation Solution
The apparatus incorporates cooling mechanisms for the plasma and separation grid, additional magnetic coils to confine plasma, and a focus ring to direct radicals, preventing diffusion and enhancing radical delivery to the workpiece.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If plasma processing is conducted using conventional equipment without cooling mechanisms and magnetic confinement, then the equipment structure is simpler, but hydrogen radicals recombine with equipment surfaces leading to reduced radical availability and processing efficiency
Solution Approach 1:
The cooling mechanisms are activated before plasma generation to pre-cool the equipment surfaces, and magnetic coils are positioned in advance to establish confinement fields. This preliminary preparation prevents hydrogen radical recombination before it occurs, maintaining high radical availability throughout the processing cycle
Solution Approach 2:
Magnetic fields act as an intermediary force between the plasma source and equipment surfaces, confining hydrogen radicals in the plasma phase and preventing direct contact with surfaces. The cooling mechanisms serve as thermal intermediaries, absorbing excess heat to maintain conditions favorable for radical stability
2Quantity of substance
If cooling mechanisms and magnetic coils are added to prevent hydrogen radical recombination, then radical availability increases, but the equipment complexity and manufacturing cost increase
Solution Approach 1:
The system dynamically adjusts cooling rates and magnetic field strengths based on plasma conditions and processing requirements. By optimizing these parameters, the patent achieves high hydrogen radical concentrations while minimizing the complexity of cooling and magnetic confinement systems through precise parameter control rather than oversimplified hardware
3Productivity
If hydrogen radicals are allowed to diffuse freely in the processing chamber, then the equipment operation is simpler, but the radical concentration at the workpiece surface decreases leading to longer processing times
Solution Approach 1:
The magnetic confinement system is designed to dynamically adapt to workpiece position and plasma conditions, adjusting field configuration to maintain optimal radical concentration at the workpiece surface. This dynamic control enables high processing speeds while managing system complexity through adaptive rather than static configurations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration maintains a higher concentration of hydrogen radicals on the workpiece surface, reducing processing time and costs while operating at lower temperatures, thus improving thermal and chemical efficiency.
Implementation Method 1
a plasma source configured to generate a plurality of radicals in a plasma from the one or more process gases in the plasma chamber
Implementation Method 2
a focus ring configured to direct the plurality of radicals towards the workpiece
Data Source
AI summary
Systems and methods for thermal treatment of a workpiece are provided. In one example, a method for conducting a treatment process on a workpiece, such as a thermal treatment process, an annealing treatment process, an oxidizing treatment process, or a reducing treatment process in a processing apparatus is provided. The processing apparatus includes a plasma chamber and a processing chamber. The plasma chamber and the processing chamber are separated by a plurality of separation grids or grid plates. The separation grids or grid plates operable to filter ions generated in the plasma chamber. The processing chamber has a workpiece support operable to support a workpiece.