Plasma Head Clogging Detection via Pressure Differential Analysis

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Solution Overview

Problem

Existing plasma emitting devices face challenges in detecting gas pressure and determining head clogging, which impede gas flow, affecting the practicality and efficiency of plasma treatment.

Innovation Solution

A plasma emitting device equipped with a mass flow controller, pressure detector, and clogging determination device that calculates reference pressure losses based on gas flow rate, tube length, and plasma head type, allowing for real-time detection of actual pressure differences to determine clogging.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a pressure detector is added to detect gas pressure in the gas tube, then the ability to determine head clogging is improved, but the device complexity increases

Engineering Contradiction:
Improvehead clogging determination accuracyVSAvoiddevice structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The pressure detector provides real-time feedback on gas pressure in the gas tube, enabling the control device to determine head clogging conditions and adjust operations accordingly. This feedback mechanism improves reliability by continuously monitoring system state without requiring complex manual inspection procedures.

Inventive Principle:
Principle #23Feedback

2Measurement precision

If reference pressure loss values are stored for different tube lengths and plasma head types, then the precision of clogging determination is improved, but the information storage requirements increase

Engineering Contradiction:
Improveclogging determination precisionVSAvoidstored reference data
Core Design Contradiction:
Measurement precisionVSQuantity of substance

Solution Approach 1:

Reference pressure loss values for different tube lengths and plasma head types are pre-calculated and stored in the control device before actual operation. This preliminary preparation enables rapid and precise clogging determination during operation without requiring complex real-time calculations, improving measurement precision while keeping data storage manageable.

Inventive Principle:
Principle #10Preliminary action

3Measurement precision

If the control device calculates reference pressure based on multiple parameters (tube length, flow rate, plasma head type), then the accuracy of clogging detection is improved, but the computational complexity increases

Engineering Contradiction:
Improvepressure measurement accuracyVSAvoidcontrol device complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The control device uses computational algorithms to calculate reference pressure based on input parameters (tube length, flow rate, plasma head type) rather than requiring complex mechanical pressure regulation mechanisms. This substitution of mechanical systems with computational methods improves measurement precision while keeping the control device complexity manageable through software-based solutions.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables effective detection of gas pressure and determination of head clogging, enhancing the practicality and reliability of the plasma emitting device by ensuring uninterrupted gas flow during plasma treatment.

Implementation Method 1

a pressure detector configured to detect a pressure of a gas supplied from the gas supply device

Methodology Applied
Scientific EffectPressure detection:

Implementation Method 2

a mass flow controller configured to control the flow rate of the gas supplied to the gas supply device

Methodology Applied
Scientific EffectFlow rate control:

Implementation Method 3

A reaction gas that constitutes a source of a plasmarized gas, and a carrier gas for carrying the reaction gas are supplied from a gas supply device to the plasma head through a gas tube. The plasma head includes a pair of electrodes, and voltage is applied between the electrodes so that the reaction gas passing between the electrodes is converted into plasma.

Methodology Applied
Scientific EffectPlasma generation: Plasma

Data Source

PatentEP3731603B1Plasma emitting device with clogging determination
Publication Date: 2023.09.13 FUJI CORP
  • EP3731603B1 patent drawingFigure 1
  • EP3731603B1 patent drawingFigure 2
  • EP3731603B1 patent drawingFigure 3

AI summary

A plasma emitting device includes plasma head 14 configured to generate a plasmarized gas and jet the plasmarized gas so generated from a nozzle thereof, a gas supply device 50 configured to supply a gas to the plasma head while controlling a flow rate of the gas, gas tube 60 connecting the gas supply device with the plasma head to constitute a gas flow path, and pressure detector 62 configured to detect a pressure of the gas supplied from the gas supply deice. Pressures PA to PD of gases which are supplied to the plasma head are detected for use for various purposes, whereby the practical plasma emitting device is made up. Specifically, for example, a head clogging, which is a clog impeding a gas flow in the plasma head, can be determined without difficulty based on the detected pressure.