Plasma Processing Hinge Assembly Self-Locking Latch Alignment

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Solution Overview

Problem

Plasma processing assemblies face misalignment issues during maintenance due to periodic rotational motion, which affects the sealing and vacuum integrity of the vacuum chamber.

Innovation Solution

A plasma processing assembly with a hinge assembly comprising a base hinge member, a hinge body, and a self-locking latch, allowing for constrained rotational motion and automatic locking of the upper process body, ensuring proper alignment and sealing during operation and maintenance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the upper process body is periodically rotated away from the lower process body for maintenance and cleaning, then the ease of operation and maintenance is improved, but misalignment between the upper and lower process bodies occurs, worsening the sealing and vacuum integrity

Engineering Contradiction:

Improvemaintenance accessibilityVSAvoidsealing integrity

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The hinge assembly incorporates a self-aligning mechanism with alignment features (alignment pins and alignment holes) that automatically restore proper alignment between the upper and lower process bodies after maintenance operations, eliminating the need for manual realignment and ensuring sealing integrity without additional operational steps

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The hinge assembly acts as an intermediary component between the upper and lower process bodies, providing a controlled connection that allows rotational motion for maintenance while maintaining alignment through integrated alignment features, thus mediating between the need for accessibility and sealing integrity

Inventive Principle:

Principle #24Intermediary (Mediator)

2Ease of repair

If the upper process body is periodically rotated for maintenance, then the ease of repair is improved, but the alignment precision deteriorates due to repeated rotational movements

Engineering Contradiction:

Improvemaintenance accessibilityVSAvoidalignment precision

Core Design Contradiction:

Ease of repairVSManufacturing precision

Solution Approach 1:

The self-aligning hinge assembly automatically restores precise alignment between the upper and lower process bodies after each maintenance cycle through its integrated alignment features, eliminating cumulative alignment errors and ensuring consistent positioning without requiring manual intervention

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The hinge assembly includes alignment features that pre-establish the correct alignment position before maintenance operations begin, and automatically restore this position after maintenance, preventing alignment drift that would otherwise accumulate over repeated use cycles

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Data Source

PatentUS8826857B2Plasma processing assemblies including hinge assemblies

Publication Date: 2014.09.09 LAM RES CORP

AI summary

In one embodiment, a plasma processing assembly may include an upper process body coupled to a hinge body and a lower process body coupled to a base hinge member. The hinge body can be pivotally engaged with the base hinge member. A self locking latch can be pivotally engaged with the base hinge member. When the hinge body is rotated around the first axis of rotation, the protruding latch engagement member can contact the self locking latch and can rotate the self locking latch around the second axis of rotation opposite to the bias direction. The self locking latch can rotate around the second axis of rotation in the bias direction and can block the hinge body from rotating around the first axis of rotation.