Plasma Ignition Power Control for Reactive Gas Generators

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Solution Overview

Problem

Existing techniques for igniting and sustaining a plasma in reactive gas generators are unreliable due to arcing outside the ignition window, punch-through issues, and impedance mismatches, leading to complex and unsafe operations.

Innovation Solution

A method and system that utilize a power supply with a measurement device and controller to adjust the ignition power based on pre-ignition signals, allowing for a broader range of pressure and gas flows, reducing the risk of anodization breakdown, and ensuring reliable ignition and operation by dynamically controlling the power supply through a switching power source and resonant circuit.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If high voltage or current is applied to spark gaps to generate initial plasma breakdown, then plasma ignition is achieved, but arcing outside the ignition window occurs and punch-through happens due to high loop and spark voltages

Engineering Contradiction:

Improveplasma ignition reliabilityVSAvoidarcing and punch-through

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The system dynamically adjusts the ignition voltage and current based on real-time feedback from the plasma ignition circuit. The controller monitors the pre-ignition signal and adjusts the power provided to the ignition circuit, preventing static high voltage conditions that cause arcing and punch-through while ensuring reliable plasma breakdown when needed.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The system uses feedback from the pre-ignition signal to control the ignition power supply. The controller measures the pre-ignition signal and adjusts the power provided to the ignition circuit accordingly, creating a closed-loop control system that prevents over-voltage conditions while ensuring reliable ignition.

Inventive Principle:

Principle #23Feedback

2Device complexity

If one power train is used for controlling multi-power train systems, then system complexity is reduced, but operation becomes unreliable due to large impedance mismatches

Engineering Contradiction:

Improvecontrol system complexityVSAvoidplasma ignition reliability

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The controller is designed to universally control multiple ignition power supplies through a single interface. The controller can adjust the power provided to each ignition circuit independently while using the same control architecture, eliminating the need for separate control systems for each power train and reducing overall system complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system changes the electrical parameters (voltage, current, impedance) of the ignition circuits dynamically to match the plasma load conditions. By adjusting these parameters in real-time, the system overcomes impedance mismatches that would otherwise cause unreliable operation when using a single power train.

Inventive Principle:

Principle #35Parameter changes

3Reliability

If the ignition power is increased to ensure reliable plasma ignition, then ignition reliability improves, but the risk of anodization breakdown and punch-through increases

Engineering Contradiction:

Improveplasma ignition reliabilityVSAvoidanodization breakdown

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The system uses dynamic control to adjust the ignition power based on real-time conditions. The controller monitors the pre-ignition signal and adjusts the power provided to the ignition circuit, ensuring sufficient power for reliable ignition while preventing excessive power that would cause anodization breakdown.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The system prepares the ignition circuit by gradually increasing the power to the plasma ignition circuit based on the pre-ignition signal. This gradual ramp-up prevents sudden high voltage spikes that could cause anodization breakdown while still ensuring reliable plasma ignition.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides reliable ignition and operation with a larger ignition space, higher gas flow rates, and safe drop-out under all gas conditions, minimizing the risk of breakdown and punch-through, while increasing block life and operational stability.

Implementation Method 1

measuring a pre-ignition signal of the plasma ignition circuit

Methodology Applied

Scientific EffectElectrical signal measurement: Ohm's Law

Implementation Method 2

providing power from an ignition power supply to a plasma ignition circuit

Methodology Applied

Scientific EffectElectrical energy conversion: Electromagnetic Induction

Data Source

PatentUS8692466B2Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator

Publication Date: 2014.04.08 MKS INSTR INC

AI summary

Described are methods and apparatuses, including computer program products, for igniting and/or sustaining a plasma in a reactive gas generator. Power is provided from an ignition power supply to a plasma ignition circuit. A pre-ignition signal of the plasma ignition circuit is measured. The power provided to the plasma ignition circuit is adjusted based on the measured pre-ignition signal and an adjustable pre-ignition control signal. The adjustable pre-ignition control signal is adjusted after a period of time has elapsed.