Plasma Imaging Measurement for Fast 3D Parameter Acquisition
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Solution Overview
Problem
Existing measurement technologies face challenges in easily and efficiently acquiring plasma parameters, particularly in a three-dimensional plasma processing environment, which requires expensive dedicated measurement devices and lengthy measurement times.
Innovation Solution
A measurement system comprising an imaging device and a plasma processing device, where the imaging device generates optical information from imaged plasma and the controller converts this information into plasma parameters using correlation information stored in a database.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If dedicated measurement devices are used to acquire plasma parameters, then measurement precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent uses imaging devices (cameras) to capture optical images of plasma, creating a visual copy of the plasma state. This optical copy is then processed to extract plasma parameters, replacing the need for complex dedicated measurement devices while maintaining measurement capability through image analysis and correlation with reference data
Solution Approach 2:
The patent replaces physical measurement probes and mechanical measurement systems with optical imaging systems. By using light to measure plasma properties and converting optical information into electrical signals for analysis, the system eliminates the need for mechanical insertion of probes into the plasma environment
2Measurement precision
If traditional measurement methods are used, then measurement accuracy is maintained, but measurement time increases
Solution Approach 1:
The imaging devices continuously capture plasma images during the plasma processing operation, enabling real-time monitoring and measurement. This continuous imaging allows plasma parameters to be measured throughout the entire processing cycle rather than requiring separate, time-consuming measurement steps
Solution Approach 2:
The system pre-stores reference plasma images and their corresponding plasma parameters in a database before actual measurements. During measurement, the system quickly compares captured images against this pre-prepared reference data to rapidly determine plasma parameters, significantly reducing measurement time
3Device complexity
If simple imaging devices are used, then device complexity is reduced, but measurement precision deteriorates
Solution Approach 1:
The patent introduces an intermediary processing system that includes image processing units and correlation databases. This intermediary layer takes simple optical images from basic imaging devices and transforms them into accurate plasma parameter measurements through computational processing and comparison with reference data, bridging the gap between simple imaging and precise measurement
4Adaptability or versatility
If multiple measurement devices are deployed, then measurement coverage is improved, but device complexity and cost increase
Solution Approach 1:
The imaging devices used in the patent serve multiple functions: they capture plasma images for parameter measurement, monitor plasma spatial distribution, and provide visual records for quality control. This multi-functionality allows a single imaging device to replace what would traditionally require multiple specialized measurement devices, reducing overall system complexity while maintaining comprehensive measurement coverage
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy and efficient acquisition of plasma parameters, including three-dimensional plasma parameters, without disturbing the plasma, thus improving plasma evaluation quality and allowing for autonomous control of plasma processing conditions.
Implementation Method 1
the imaging device is configured to generate optical information of the plasma from image data of imaged plasma
Data Source
AI summary
A measurement system including an imaging device and a plasma processing device having a plasma generator configured to generate plasma from a gas supplied into a processing chamber and a controller. The imaging device is configured to generate optical information of the plasma from image data of imaged plasma in the processing chamber, and the controller is configured to convert the generated optical information of the plasma into a plasma parameter that determines physical characteristics of the plasma with reference to a storage that stores correlation information between the optical information of the plasma and measurement results of the plasma parameter.