Plasma Injector Flange Protects Window Plate
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Solution Overview
Problem
The structural vulnerability of the window plate in plasma processing apparatuses, particularly around the fastening hole, leads to particulation due to plasma damage, and non-uniform gas distribution results in decreased product yield.
Innovation Solution
A plasma processing apparatus design featuring an injector with a flange part that covers the bottom surface of the window plate around the fastening hole, combined with multiple nozzles for distributing and injecting process gas in different directions, enhancing gas uniformity and protecting the vulnerable region from plasma exposure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single nozzle is used to inject process gas vertically, then the structure is simple, but the gas distribution becomes non-uniform in the wafer edge region
Solution Approach 1:
The single nozzle is divided into multiple nozzles (first nozzles and second nozzles) positioned at different locations and orientations. The first nozzles inject gas vertically while the second nozzles inject gas at an angle, creating segmented gas injection paths that collectively achieve uniform distribution across the wafer surface including edge regions.
Solution Approach 2:
The gas injection is extended from a single vertical dimension to multiple dimensions by adding nozzles that inject gas at angles. This multi-directional injection approach adds spatial complexity to the injection pattern, enabling uniform gas distribution across the entire wafer surface including previously underserved edge regions.
2Duration of action of stationary object
If the window plate is reused after cleaning or polishing, then the service life is extended, but the hole peripheral region becomes more vulnerable to plasma damage and particulation
Solution Approach 1:
The flange part is designed to cover the hole peripheral region before plasma exposure occurs. By pre-positioning this protective structure, the vulnerable region is shielded from plasma damage during operation, preventing particulation and maintaining structural integrity even after multiple cleaning and polishing cycles that extend service life.
Solution Approach 2:
The flange part acts as an intermediary protective element between the plasma environment and the vulnerable hole peripheral region. This intermediate structure absorbs or deflects plasma exposure away from the weakened region, allowing the window plate to be reused multiple times without compromising the integrity of the fastening hole area.
3Reliability
If the flange part is designed to cover the hole peripheral region, then plasma damage is prevented, but the injector structure becomes more complex
Solution Approach 1:
The flange part is merged with the injector body to form an integrated structure. By combining the protective flange with the gas injection function in a single unified component, the design achieves plasma protection without requiring separate protective elements, thereby minimizing overall structural complexity while maintaining reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces particulation and extends the service life of the window plate by ensuring uniform gas distribution and preventing plasma damage, thereby improving product yield.
Implementation Method 1
A process gas is excited to a plasma state inside the chamber and collides with an etching target (for example, a wafer) to perform an etching process
Data Source
AI summary
A plasma processing apparatus includes a chamber, a window plate disposed in an upper portion of the chamber and having a fastening hole defined therein, an injector having a body part including a plurality of nozzles and configured to be fastened to the fastening hole, and a flange part extending radially from the body part to partially cover a bottom surface of the window plate when the body part is fastened to the fastening hole, and a stopper configured to be fastened to the body part on an upper surface of the window plate to hold the injector in the fastening hole when the body part is fastened to the fastening hole.