Plasma Chamber Lift Sequence to Prevent Abnormal Discharge
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Solution Overview
Problem
Conventional plasma processing apparatuses often experience abnormal discharges due to the formation of spaces between lifting members and the object being processed, which can lead to inefficiencies and potential damage during plasma processing.
Innovation Solution
A plasma processing apparatus and method that utilize a first support member to raise and lower the object and a second support member to raise and lower a cover, with a drive part that raises the cover in two stages: first, without raising the object, and second, integrally with the object, to minimize the distance between the object and the support members, thereby reducing the likelihood of abnormal discharges.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the first and second lifting members are lowered integrally to perform plasma processing, then the structure is simple and easy to operate, but a space is formed between the lifting member and the object which may lead to abnormal discharge
Solution Approach 1:
The lifting mechanism is segmented into two independent lifting members: a first lifting member for the object and a second lifting member for the cover. This allows independent control of each component, enabling the cover to be lowered close to the object without forming abnormal discharge spaces, while maintaining operational simplicity through coordinated movement.
Solution Approach 2:
The system transitions from static integral lifting to dynamic independent lifting. The drive part can control the first and second lifting members to move at different rates and positions, allowing the cover to be positioned optimally close to the object during plasma processing to eliminate abnormal discharge spaces while maintaining ease of operation through automated control.
2Manufacturing precision
If the cover is raised without raising the object, then the cover can be positioned precisely, but the structure becomes more complex
Solution Approach 1:
The lifting system is divided into two independently controllable lifting members, each capable of precise positioning. The first lifting member supports the object while the second lifting member supports the cover, allowing the cover to be raised to a precise intermediate position close to the object without moving the object, thereby achieving high positioning precision.
Solution Approach 2:
The drive part acts as an intermediary control system that coordinates the movement of both lifting members. It can control the second lifting member to raise the cover to a precise intermediate position while keeping the first lifting member stationary, enabling precise positioning without requiring complex mechanical modifications to the lifting members themselves.
Data Source
AI summary
A plasma processing apparatus 10 includes: a first support member 81 for raising and lowering an object to be processed 200, a second support member 82 supporting a cover 70, a drive part 120 for raising and lowering the cover 70 via the second support member 82. The drive part 120, when raising the cover 70 from a lowered position to a raised position, in a first process, raises the second support member 82 without raising the first support member 81, and thus to raise the cover 70 without raising the object to be processed 200, and in a second process, raises the first and second support members 81 and 82 integrally, and thus to raise the cover 70 from the beginning of the second process, and raise the object to be processed 200 from the beginning of or after the beginning of the second process.