Laser-Sustained Plasma Light Source with Laminar Flow Cell

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Solution Overview

Problem

Laser-sustained plasma light sources face instability and optical aberrations due to turbulent gas flow and temperature variations, particularly in high-pressure gases like xenon, which affect the size, shape, brightness, and spectrum of the plasma, and the focusing properties of the lasers.

Innovation Solution

A continuous tube cell with a circular cross section and a gas volume that circulates in a stable laminar flow, either through passive convection or active pumping, with cooling mechanisms and hollow electrodes to manage gas temperature and flow, ensuring that heated gas is cooled before reentering the plasma, reducing noise and enhancing light collection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If high-pressure gas is used in the plasma cell, then the plasma brightness and light output are improved, but the gas flow becomes turbulent and unstable, causing plasma instability and optical aberrations

Engineering Contradiction:
Improveplasma brightnessVSAvoidgas flow stability
Core Design Contradiction:
Illumination intensityVSStability of the object's composition

Solution Approach 1:

A flow straightener is introduced as an intermediary component between the gas source and the plasma region. This device mediates the turbulent high-pressure gas flow, converting it into laminar flow before the gas enters the plasma cell, thereby maintaining both high brightness and flow stability

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the flow regime parameter from turbulent to laminar by introducing a flow straightener. This parameter change allows the system to maintain high gas pressure for brightness while achieving stable laminar flow for plasma consistency

Inventive Principle:
Principle #35Parameter changes

2Stability of the object's composition

If gas flow velocity is increased to improve plasma stability, then the plasma becomes more stable, but optical aberrations increase due to temperature variations and turbulent flow

Engineering Contradiction:
Improveplasma stabilityVSAvoidoptical precision
Core Design Contradiction:
Stability of the object's compositionVSManufacturing precision

Solution Approach 1:

The flow straightener acts as an intermediary that decouples the relationship between flow velocity and turbulence. It allows high velocity laminar flow to reach the plasma region while preventing the generation of turbulent eddies that would cause optical aberrations

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The gas delivery system is segmented into distinct zones: a turbulent mixing zone before the flow straightener, and a laminar flow zone after it. This segmentation allows turbulent flow to be converted into laminar flow, achieving both stability and optical precision

Inventive Principle:
Principle #1Segmentation

3Illumination intensity

If the plasma core is maintained at high temperature, then the light brightness is improved, but the cell walls and electrodes heat up to excessive temperatures, causing instability

Engineering Contradiction:
Improvelight brightnessVSAvoidcell wall temperature
Core Design Contradiction:
Illumination intensityVSTemperature

Solution Approach 1:

Heat is extracted from the gas flow in a dedicated cooling section located after the plasma region. This removes excess thermal energy from the gas before it reaches the cell walls and electrodes, preventing overheating while maintaining high plasma temperature for brightness

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The thermal management is separated into different spatial dimensions: the plasma region maintains high temperature for light production, while a subsequent cooling section reduces temperature before gas contact with structural components. This dimensional separation of thermal zones resolves the temperature contradiction

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution stabilizes the gas flow and temperature, reducing optical aberrations and increasing the brightness and uniformity of the light produced by maintaining a smaller, hotter plasma core, thus improving the efficiency and consistency of the laser-sustained plasma light source.

Implementation Method 1

at least one laser directed into the gas volume, for sustaining a plasma within the gas volume

Methodology Applied
Scientific EffectLaser heating: Laser

Implementation Method 2

the gas volume circulates through the continuous tube of the cell via passive convection

Methodology Applied
Scientific EffectConvection: Convection

Implementation Method 3

the plasma producing a light

Methodology Applied
Scientific EffectPlasma light emission: Luminescence

Implementation Method 4

a reflector for collecting the light and providing the light to a desired location

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS9526158B1Laser-sustained plasma light source
Publication Date: 2016.12.20 KLA CORP
  • US9526158B1 patent drawing
  • US9526158B1 patent drawing

AI summary

A laser sustained plasma light source having a cell with a gas volume contained within the cell. At least one laser is directed into the gas volume, for sustaining a plasma within the gas volume, which plasma produces a light. Means are provided for continuously providing the gas volume to the plasma in a laminar flow. A reflector collects the light and provides the light to a desired location.