Plasma Light Source Pulse Filtering for Stable Target Irradiation

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Solution Overview

Problem

Existing light source apparatuses face instability in irradiating target materials, leading to inconsistent plasma generation and detection results.

Innovation Solution

A light source apparatus with a target holding unit that rotates the target material using centrifugal force, combined with a laser system that includes a switch or element group to suppress low power components in amplified light, ensuring stable plasma generation by synchronizing the switch's state with seed pulses or utilizing nonlinear optical effects for wavelength conversion and filtration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If amplified light is directly irradiated to the target material, then high power plasma generation is achieved, but low power components cause instability in irradiation

Engineering Contradiction:
Improvepower of amplified lightVSAvoidstability of irradiation
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The patent extracts and removes low power components from the amplified light beam using a switch or nonlinear optical element group. This separation allows the high power components to reach the target material for plasma generation while the unstable low power components are suppressed, resolving the contradiction between maintaining high power output and achieving stable irradiation.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the transmission characteristics of the optical system by using a switch or nonlinear optical element that responds differently to various power levels. By dynamically adjusting the transmission parameter based on power level, the system allows high power components through while blocking low power components, thus achieving both high power plasma generation and stable irradiation.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If a switch is added to suppress low power components, then irradiation stability is improved, but device complexity increases

Engineering Contradiction:
Improvestability of irradiationVSAvoidcomplexity of laser system
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent introduces a switch or nonlinear optical element group as an intermediary component between the amplifier and target material. This intermediary automatically filters low power components based on their power level, providing a relatively simple solution to achieve stable irradiation without requiring complex control systems or multiple separate devices.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If nonlinear optical elements are used for wavelength conversion, then low power component suppression is achieved, but energy loss increases

Engineering Contradiction:
Improvestability of plasma generationVSAvoidenergy loss in wavelength conversion
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent utilizes nonlinear optical elements that change their optical parameters (wavelength, transmission) based on the power level of incident light. High power components undergo wavelength conversion and are transmitted to the target, while low power components are blocked. This parameter-based filtering achieves stable plasma generation while managing energy loss through the nonlinear optical conversion process.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Stabilizes the irradiation process, enhancing the consistency and luminance of plasma generation, resulting in improved detection accuracy and reliability.

Implementation Method 1

a target holding unit configured to hold a target material on an inner wall surface with a centrifugal force caused by rotation around a rotation axis

Methodology Applied
Scientific EffectCentrifugal force: Centrifugal Force

Implementation Method 2

an element group exhibiting a nonlinear optical effect provided between the amplifier and the target material. The switch or the element group suppresses a power component in the amplified light which is equal to or smaller than a predetermined threshold

Methodology Applied
Scientific EffectNonlinear optical effect:

Implementation Method 3

a laser configured to excite the target material with a ray that is based on amplified light amplified by an amplifier

Methodology Applied
Scientific EffectLight-induced plasma generation: Plasma

Data Source

PatentUS20250357720A1Light source apparatus
Publication Date: 2025.11.20 LASERTEC CORP
  • US20250357720A1 patent drawing
  • US20250357720A1 patent drawing
  • US20250357720A1 patent drawing

AI summary

A light source apparatus according to the present disclosure includes a target holding unit configured to hold a target material on an inner wall surface with a centrifugal force caused by rotation around a rotation axis, a laser configured to excite the target material with a ray that is based on amplified light amplified by an amplifier, and a switch provided between the amplifier and the target material or an element group exhibiting a nonlinear optical effect provided between the amplifier and the target material. The light switch or the element group suppresses a power component in the amplified light which is equal to or smaller than a predetermined threshold, and the target material generates plasma with a ray in which the power component is suppressed.