Plasma Light Source Double Hybrid Mirror System

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Solution Overview

Problem

Current laser-induced plasma light sources face challenges in achieving high brightness due to limitations in igniting and sustaining plasma effectively, which restricts their luminous intensity and stability.

Innovation Solution

A plasma light source design incorporating a chamber with an ionizable medium, an ignition source for microwave energy, and a sustaining source for laser energy, along with a double hybrid mirror system that optimally reflects and directs electromagnetic radiation to enhance plasma ignition and maintenance, increasing plasma intensity and brightness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If laser energy alone is used to ignite and sustain plasma, then the system structure is simple, but plasma ignition efficiency and brightness are insufficient

Engineering Contradiction:
Improveplasma brightnessVSAvoidsystem structure
Core Design Contradiction:
Illumination intensityVSDevice complexity

Solution Approach 1:

The patent combines microwave energy and laser energy into a single plasma light source system. The microwave generator provides electromagnetic radiation for plasma ignition, while the laser generator provides energy for sustaining plasma. This merging of two different energy sources resolves the contradiction by achieving high plasma brightness through combined heating effects while maintaining a unified system structure with integrated optical components.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent segments the energy input process into two distinct stages: ignition phase using microwave energy and sustainment phase using laser energy. The chamber is designed with separate optical paths for microwave radiation and laser beams, allowing each energy source to perform its specialized function optimally without interference, thus achieving high plasma brightness through divided functional responsibilities.

Inventive Principle:
Principle #1Segmentation

2Productivity

If conventional single-source plasma generation is used, then the system is simple to operate, but plasma intensity and luminous output are limited

Engineering Contradiction:
Improveplasma intensityVSAvoidsystem control
Core Design Contradiction:
ProductivityVSEase of operation

Solution Approach 1:

The patent implements continuous plasma generation by sequentially applying microwave energy for ignition and then maintaining plasma with continuous laser energy input. The microwave generator operates during the ignition phase to create plasma, and the laser generator takes over for sustained operation, ensuring uninterrupted plasma production and high luminous output throughout the operational cycle.

Inventive Principle:
Principle #20Continuity of useful action

3Illumination intensity

If plasma light is not focused, then the optical system is simple, but brightness and luminous intensity are insufficient

Engineering Contradiction:
Improveplasma light brightnessVSAvoidoptical system
Core Design Contradiction:
Illumination intensityVSDevice complexity

Solution Approach 1:

The patent employs curved mirrors instead of flat mirrors for reflecting and focusing plasma light. The first curved mirror reflects plasma light generated in the chamber, and the second curved mirror further focuses this reflected light. The curved surfaces enable effective light concentration and directional control, achieving high plasma light brightness through geometric focusing without requiring complex optical components.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively ignites and sustains plasma, significantly increasing plasma intensity and brightness, addressing the limitations of existing technologies by efficiently focusing plasma light and maintaining high luminous intensity.

Implementation Method 1

an ignition source configured to provide first electromagnetic radiation to the chamber... The first electromagnetic radiation may be microwave energy... to ignite the plasma

Methodology Applied
Scientific EffectPlasma ignition via electromagnetic radiation: Electromagnetic Induction

Implementation Method 2

a sustaining source configured to separately provide second electromagnetic radiation to the chamber... The second electromagnetic radiation may be laser energy... to sustain the plasma

Methodology Applied
Scientific EffectPlasma sustenance via laser energy: Laser

Implementation Method 3

a second curved mirror positioned opposite the first mirror and arranged to direct the first electromagnetic radiation toward the chamber

Methodology Applied
Scientific EffectElectromagnetic radiation reflection: Reflection

Implementation Method 4

The laser-induced plasma light source may generate plasma by exciting gas filled within a quartz valve using an external laser beam focused thereon. The laser-induced plasma light source may thereby generate light with a stable spectral distribution and/or luminous intensity

Methodology Applied
Scientific EffectPlasma light emission: Luminescence

Data Source

PatentUS9305764B2Plasma light source, inspection apparatus including plasma light source, and method of generating plasma light
Publication Date: 2016.04.05 SAMSUNG ELECTRONICS CO LTD
  • US9305764B2 patent drawing
  • US9305764B2 patent drawing
  • US9305764B2 patent drawing

AI summary

A plasma light source includes a chamber having an ionizable medium therein, an ignition source configured to provide first electromagnetic radiation to the chamber, a sustaining source configured to separately provide second electromagnetic radiation to the chamber, a first curved mirror positioned adjacent the chamber, and a second curved mirror positioned opposite the first mirror and arranged to direct the first electromagnetic radiation toward the chamber. The second electromagnetic radiation may be different than the first electromagnetic radiation. Related devices and methods of operation are also discussed.