Dielectric Liner Structure for Plasma Source Erosion Control
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Solution Overview
Problem
Inductive plasma sources used for compound abatement in semiconductor processing erode dielectric tubes and form deposits, leading to costly cleaning and downtime.
Innovation Solution
A plasma source with a dielectric liner positioned inside the dielectric tube to shield it from erosion and deposits, allowing for easy replacement of the liner to minimize downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If inductive plasma is used for compound abatement, then abatement effectiveness is improved, but dielectric tube erosion and deposit formation worsen
Solution Approach 1:
A sacrificial dielectric liner is introduced as an intermediary component between the plasma and the dielectric tube. The liner absorbs the harmful effects of plasma exposure including erosion and deposit formation, protecting the main dielectric tube while allowing the plasma to continue its abatement function effectively
Solution Approach 2:
The dielectric structure is segmented into two separate components: a reusable dielectric tube and a replaceable dielectric liner. This segmentation allows the liner to be periodically removed and replaced without replacing the entire dielectric tube, maintaining abatement effectiveness while managing erosion and deposit issues
2Reliability
If dielectric tube cleaning or replacement is performed, then deposit removal and erosion repair are improved, but equipment downtime and operational costs worsen
Solution Approach 1:
By dividing the dielectric structure into a permanent tube and a removable liner, the system enables quick replacement of only the contaminated liner component. This segmentation reduces downtime significantly compared to replacing or cleaning the entire dielectric tube assembly
Solution Approach 2:
The dielectric liner is designed as a consumable, lower-cost component that can be quickly replaced when eroded or contaminated. This approach is more economical and time-efficient than maintaining or replacing the expensive dielectric tube itself
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents dielectric tube erosion and deposit accumulation, enabling quick liner replacement and reducing equipment downtime.
Implementation Method 1
High frequency power (e.g., radio frequency power) can be applied to the one or more coils to generate varying electromagnetic fields that can be used to generate the inductive plasma in the plasma source
Implementation Method 2
a dielectric liner positioned inside the dielectric tube, wherein the dielectric liner includes one or more outer surfaces, the dielectric liner is disposed around an interior plasma-generating volume of the plasma source, and the dielectric liner covers the one or more interior surfaces of the dielectric tube
Data Source
AI summary
A plasma source is provided including: a dielectric tube having one or more interior surfaces extending from a first opening at a first end of the dielectric tube to a second opening at a second end of the dielectric tube; a coil antenna disposed around the dielectric tube; and a dielectric liner positioned inside the dielectric tube. The dielectric liner includes one or more outer surfaces. The dielectric liner is disposed around an interior plasma-generating volume of the plasma source. The dielectric liner extends from a first end of the dielectric liner to a second end of the dielectric liner, and the dielectric liner covers the one or more interior surfaces of the dielectric tube.