Event-Controlled Plasma Power Data Storage
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Solution Overview
Problem
Existing plasma process power delivery systems lack efficient data storage and analysis capabilities, particularly during events like short circuits or arcs, which hinders rapid process development and requires continuous data transmission that can overload interfaces.
Innovation Solution
A method involving a first volatile memory for rapid data storage with high temporal resolution, followed by transmission and storage in a second non-volatile memory for analysis, allowing event-controlled data storage and enabling the analysis of circumstances leading up to and following predefined events.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If continuous data transmission is implemented to enable comprehensive analysis of plasma process events, then measurement precision and analysis capability are improved, but interface overload and system complexity increase
Solution Approach 1:
The patent extracts only the essential data required for event analysis from the continuous data stream and stores it in a buffer memory. This selective extraction approach enables comprehensive event analysis without requiring continuous transmission of all data, thereby avoiding interface overload while maintaining measurement precision for critical events.
Solution Approach 2:
The system performs preliminary data filtering and selection by storing only relevant event data in the buffer memory before transmission. This preliminary action prepares the data in advance, ensuring that only necessary information is transmitted, which reduces interface complexity while preserving analysis capability for plasma process events.
2Measurement precision
If high temporal resolution data storage is implemented to capture rapid plasma events, then measurement precision is improved, but memory requirements and data management complexity increase
Solution Approach 1:
The patent extracts only the essential data required for event analysis from the continuous data stream and stores it in a buffer memory. This selective extraction approach enables comprehensive event analysis without requiring continuous transmission of all data, thereby avoiding interface overload while maintaining measurement precision for critical events.
Solution Approach 2:
The system applies different storage strategies to different data based on their importance. Critical event data is stored with high temporal resolution in the buffer memory, while non-critical data is handled differently. This local quality approach ensures high measurement precision for essential events without proportionally increasing overall data volume and management complexity.
3Device complexity
If event-triggered data transmission is implemented to reduce interface load, then device complexity is reduced, but information loss may occur during critical events
Solution Approach 1:
The system performs preliminary data filtering and selection by storing only relevant event data in the buffer memory before transmission. This preliminary action prepares the data in advance, ensuring that only necessary information is transmitted, which reduces interface complexity while preserving analysis capability for plasma process events.
Solution Approach 2:
The system uses event detection as a feedback mechanism to trigger selective data transmission. When a predefined event is detected, the system activates data transmission from the buffer memory. This feedback-based approach ensures that information is transmitted only when necessary, preventing information loss during critical events while maintaining simple interface management during normal operation.
Data Source
AI summary
A plasma process power delivery system includes one or more event-ascertaining devices within the plasma process power delivery system, a controller in communication with the one or more event ascertaining devices, a first memory, a second memory, a data transmission connection, and a plasma process monitoring system. The data transmission connection is between the first memory and the second memory and is configured to transmit data relating to the plasma process power delivery system between the first memory and the second memory in response to an occurrence of a predefined event ascertained by one or more event-ascertaining devices. The plasma process monitoring system is in communication with the second memory and analyzes circumstances associated with the event that triggers the storage in the second memory using the data stored in the second memory.