Plasma Probe Light Transmission Portion for Radical Density Monitoring
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing plasma monitoring techniques face challenges in accurately measuring radical density during film forming processes due to deposition of films on transmission parts, which reduces emission intensity and hinders precise monitoring of plasma states.
Innovation Solution
A plasma probe device with an antenna and light transmission portion is designed to transmit plasma emissions from a vacuum space to an atmospheric space, allowing for accurate monitoring of radical density by preventing film deposition and maintaining emission intensity, while using a seal member to prevent gas infiltration and corrosion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a transmission part is used to monitor plasma emission, then plasma state monitoring is enabled, but film deposition on the transmission part reduces emission intensity and measurement accuracy
Solution Approach 1:
The light transmission portion is extracted from the vacuum space environment and positioned in the atmospheric space, allowing it to transmit plasma emission signals without being exposed to the vacuum plasma environment where film deposition occurs. This separates the transmission function from the harmful deposition environment.
Solution Approach 2:
The antenna serves as an intermediary component that couples the vacuum space plasma environment with the atmospheric space measurement environment. It transmits electromagnetic signals from the plasma region through the wall opening without requiring a physical transmission part to be exposed to the vacuum plasma, thereby preventing film deposition while enabling emission monitoring.
2Measurement precision
If an opening is made in the processing container wall for monitoring, then plasma emission can be detected, but gas infiltration and corrosion of the monitoring device occur
Solution Approach 1:
The light transmission portion is taken out from the vacuum space and positioned in the atmospheric space, allowing the monitoring function to be performed without placing a transmission component inside the vacuum chamber where gas infiltration and corrosion would occur.
Solution Approach 2:
The antenna acts as an intermediary that enables signal transmission through the container wall opening while the seal member prevents gas infiltration. The antenna transmits electromagnetic signals without providing a physical pathway for gas leakage, and the seal member closes the opening to prevent corrosion of internal components.
3Reliability
If a seal member is installed to prevent gas infiltration, then device reliability is improved, but the structure becomes more complex
Solution Approach 1:
The antenna and seal member are combined into an integrated assembly where the antenna passes through the opening and the seal member seals around the antenna. This merging of functions reduces the number of separate components and simplifies the overall structure while maintaining effective sealing.
Solution Approach 2:
The antenna serves multiple functions: it acts as a transmission element for electromagnetic signals, provides structural support for the seal member, and enables the opening in the container wall to be sealed while maintaining signal transmission capability. This multi-functionality reduces the need for additional dedicated sealing components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-accuracy monitoring of radical density in plasma generation spaces during film forming processes by maintaining emission intensity and preventing film deposition on the plasma probe device, thus ensuring precise plasma state monitoring.
Implementation Method 1
a light transmission portion installed inside the antenna or forming at least a portion of the antenna, and configured to transmit emission of plasma generated in the vacuum space to the atmospheric space
Implementation Method 2
an antenna installed in an opening portion formed in a wall of a processing container via a seal member that seals between a vacuum space and an atmospheric space
Data Source
AI summary
A plasma probe device includes: an antenna installed in an opening portion formed in a wall of a processing container via a seal member that seals between a vacuum space and an atmospheric space; and a light transmission portion installed inside the antenna or forming at least a portion of the antenna, and configured to transmit emission of plasma generated in the vacuum space to the atmospheric space.