Plasma Probe Antenna Depression and Sealing
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Solution Overview
Problem
Conventional plasma probe devices are prone to performance deterioration due to gas intrusion and corrosion, which affects the accuracy of plasma measurements and leads to film formation residues.
Innovation Solution
A plasma probe device with a dielectric antenna unit installed through a sealing member at an opening in the processing chamber, featuring a depressed surface and a dielectric support portion to prevent gas intrusion and reduce stray currents, ensuring accurate plasma measurement while minimizing corrosion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the probe is disposed along the wall of the chamber or protrudes toward the plasma generation space, then the plasma state can be measured, but gas, products, or particles can enter the gap between the probe and the wall, causing corrosion and performance deterioration
Solution Approach 1:
The invention extracts the harmful gap between the probe and chamber wall by introducing a sealing member that eliminates the space where gas and particles could accumulate. The sealing member is positioned to contact both the probe and the wall, effectively removing the problematic gap that leads to corrosion and performance deterioration.
Solution Approach 2:
The sealing member acts as an intermediary element between the probe and the chamber wall. It provides a sealing interface that prevents gas and particle intrusion while maintaining the necessary positioning of the probe for plasma measurement. The intermediary sealing member resolves the conflict between needing probe access and preventing contamination.
2Measurement precision
If the probe is disposed to face the plasma generation space, then plasma measurement is enabled, but gas and particles are likely to enter the gap between the probe and the wall
Solution Approach 1:
The sealing member removes the harmful gap space between the probe and chamber wall, eliminating the pathway for gas and particle intrusion. By extracting this gap, the invention maintains probe positioning for measurement while preventing contamination.
Solution Approach 2:
The sealing member functions as a flexible or conformal barrier that adapts to the interface between the probe and chamber wall. This thin film or shell structure effectively seals the gap, preventing harmful factors from reaching the probe while allowing the probe to maintain its measurement-oriented positioning.
3Reliability
If gas enters the probe, then the probe structure is compromised, but corrosion and film formation residues occur
Solution Approach 1:
The sealing member extracts and eliminates the gap that allows gas entry into the probe structure. By removing this access pathway, the invention prevents the chain of events leading to corrosion and film formation, thereby maintaining probe durability and reliability.
Solution Approach 2:
The sealing member converts the potential harm of gas intrusion into a benefit by creating a protective barrier. What would have been a harmful pathway for corrosion is transformed into a sealed interface that protects the probe while still allowing the probe to function for plasma measurement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances measurement sensitivity and reliability by preventing gas intrusion and reducing corrosion, maintaining the performance and accuracy of plasma measurements.
Implementation Method 1
a sealing member configured to seal between a vacuum space and an atmospheric space
Implementation Method 2
a dielectric support portion made of a dielectric material and configured to support the antenna unit from an outer peripheral side
Implementation Method 3
a surface of the antenna unit which is exposed through the opening and separated from a facing surface of the wall or the mounting table facing the antenna unit by a width is depressed from a surface of the wall or the mounting table where the opening is formed
Data Source
AI summary
A plasma probe device includes an antenna unit installed at an opening formed in a wall of a processing chamber or a mounting table through a sealing member configured to seal between a vacuum space and an atmospheric space, an electrode connected to the antenna unit, and a dielectric support portion made of a dielectric material and configured to support the antenna unit from an outer peripheral side. A surface of the antenna unit which is exposed through the opening and separated from a facing surface of the wall or the mounting table facing the antenna unit by a width is depressed from a surface of the wall or the mounting table where the opening is formed, which faces a plasma generation space.