Plasma Reactor Cooling Layout for Stable Ignition and Heat Control
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Solution Overview
Problem
Existing plasma reactors face issues with uneven cooling distribution, reduced cooling efficiency, uncontrollable flow rate, temperature, and pressure of cooling water, leading to particle generation, plasma ignition failure, and reduced plasma generation efficiency, especially in large-scale semiconductor manufacturing processes.
Innovation Solution
A plasma reaction device with a reactor body and magnetic core design that optimizes cooling efficiency by inducing cooling water flow direction based on thermal convection, using a cooling block and circulation line to manage temperature and pressure, and includes sensors and controllers for precise control during plasma generation and standby modes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If cooling water is circulated through the reactor body and magnetic core, then overheating is prevented and cooling efficiency is improved, but cooling efficiency is reduced because natural convection due to density difference is not usable and flow rate is not accurately controllable
Solution Approach 1:
The patent applies dynamics by making the cooling water flow rate adjustable and controllable through a flow rate controller, allowing the system to adapt to different operational conditions (plasma generation mode vs. standby mode) rather than using a fixed flow rate, thereby resolving the controllability issue
Solution Approach 2:
The patent implements feedback control by using temperature sensors to monitor the reactor body temperature and magnetic core temperature, and using this information to adjust the cooling water flow rate through the flow rate controller, ensuring optimal cooling efficiency while preventing overheating
2Temperature
If cooling water is circulated at high flow rate to improve cooling efficiency, then overheating is prevented, but particles are generated and plasma ignition fails due to excessive cooling in standby mode
Solution Approach 1:
The patent applies dynamics by implementing mode-dependent flow rate control, where the flow rate controller adjusts the cooling water flow rate based on the operational mode (high flow rate during plasma generation to prevent overheating, low flow rate during standby to prevent excessive cooling and particle generation), thereby resolving the reliability issue
Solution Approach 2:
The patent implements periodic action by switching between different cooling regimes corresponding to different operational modes (plasma generation mode and standby mode), adjusting the cooling intensity periodically according to the operational requirements to maintain both overheating prevention and plasma ignition reliability
3Temperature
If cooling water flow rate is increased to improve cooling efficiency, then temperature control is improved, but plasma generation efficiency is reduced due to inaccurate flow rate control
Solution Approach 1:
The patent implements feedback control by using temperature sensors to monitor the actual temperature of the reactor body and magnetic core, and using this feedback information to adjust the cooling water flow rate through the flow rate controller, achieving accurate temperature control that maintains plasma generation efficiency while preventing overheating
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances cooling efficiency, prevents particle generation, and increases plasma ignition and retention rates by controlling cooling water flow, temperature, and pressure, optimizing performance in both plasma generation and standby modes.
Implementation Method 1
a cooling block mounted outside the reactor body or the magnetic core, being in thermal contact with the reactor body or the magnetic core
Implementation Method 2
a cooling water circulation line mounted between the connecting block, the cooling block, and the reactor body in such a manner that the cooling water provided through the connecting block passes through the block cooling channel of the cooling block, then passes through the body cooling channel of the reactor body
Implementation Method 3
cooling efficiency is greatly reduced because natural convection due to a difference in density based on expansion of heated cooling water is not usable
Data Source
AI summary
Provided are a plasma reaction device capable of cooling a reactor body and a magnetic core by circulating cooling water, and a cooling method thereof, the plasma reaction device including an annular loop space therein, and a body cooling channel therein, a magnetic core having a primary coil to generate plasma by exciting a gas in the annular loop space, a cooling block being in thermal contact with the reactor body or the magnetic core, and having a block cooling channel therein, a connecting block having a first water inlet pipe and a first water outlet pipe at a side thereof to supply cooling water at a first temperature, and having a second water inlet pipe and a second water outlet pipe at another side thereof to collect the cooling water at a second temperature higher than the first temperature, and a cooling water circulation line mounted between the connecting block, the cooling block, and the reactor body.