Plasma Resistant Coating With Tailorable CTE
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Solution Overview
Problem
Chamber components and their coatings in manufacturing processes are susceptible to defects due to high temperatures, high energy plasma, and corrosive gases, leading to increased susceptibility to cracking and erosion, primarily caused by mismatched Coefficient of Thermal Expansion (CTE) between adjacent materials.
Innovation Solution
A method is developed to create a plasma-resistant coating material with a tailored CTE by mixing an initial plasma-resistant coating material with ScF3, a material having a negative CTE, to form a final coating with a CTE within 20% of the component's CTE, thereby reducing tensile forces and enhancing coating integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an initial plasma resistant coating material with higher CTE is used, then plasma resistance is improved, but CTE mismatch with the component increases leading to tensile forces and cracking
Solution Approach 1:
The patent modifies the CTE parameter of the coating material by incorporating ScF3, which has a negative CTE. This parameter change allows the final coating material to have a tailored CTE that closely matches the component's CTE, reducing thermal stress and preventing cracking while maintaining plasma resistance
Solution Approach 2:
The patent creates a composite coating material by combining an initial plasma resistant coating material (such as YF3, Y2O3, CaF2, MgF2, SrF2, AlF3, ErF3, LaF3, NdF3, CeF4, ZrF4) with ScF3. This composite structure allows the coating to simultaneously achieve plasma resistance from the initial material and CTE matching through the ScF3 component
2Ease of manufacture
If the CTE of the coating material does not match the component CTE, then manufacturing simplicity is maintained, but tensile forces increase causing cracking and erosion
Solution Approach 1:
The patent changes the CTE parameter of the coating material by adding ScF3, enabling the final coating to have a tailored CTE within 20% of the component's CTE. This parameter adjustment reduces thermal expansion mismatch and prevents cracking during thermal cycling, thereby improving coating durability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The tailored plasma-resistant coating material improves the service life of chamber components by reducing cracking and erosion, while maintaining resistance to plasma processing conditions, thus lowering maintenance and manufacturing costs.
Implementation Method 1
mixing the initial plasma resistant coating material with a plasma resistant coating material having a negative CTE, such as ScF3
Implementation Method 2
mismatch in CTEs of adjacent materials may expose the components' coatings to tensile forces which increase the coatings' susceptibility to cracking
Data Source
AI summary
An article comprises a body and at least one final plasma resistant coating layer on at least one surface of the body. The at least one final plasma resistant coating layer is a mixture of a ScF3 and an initial plasma resistant coating material selected from the group consisting of YF3, Y2O3, a compound of Y4Al2O9, a solid-solution of Y2O3—ZrO2, CaF2, MgF2, SrF2, AlF3, ErF3, LaF3, NdF3, ScF3, CeF4, ZrF4, and combinations thereof. The at least one final plasma resistant coating layer has a thermal expansion coefficient that is within about 20% of the thermal expansion coefficient of the body.