Consumable Ring Position Correction in Plasma Cluster Tools
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing cluster tools face challenges in properly transferring consumable components to plasma processing modules due to docking errors between the plasma processing module and the mobile replacement apparatus, leading to positional misalignment issues.
Innovation Solution
A cluster tool system is designed with a plasma processing apparatus, a mobile replacement apparatus, and control circuitry, incorporating a transfer robot and position detection sensors to adjust the horizontal position of consumable components using lifter pins, ensuring accurate placement despite docking errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a mobile replacement apparatus is used to transfer consumable components, then the flexibility and ease of operation are improved, but docking errors cause positional misalignment that deteriorates manufacturing precision
Solution Approach 1:
The patent introduces a position detection sensor as an intermediary between the mobile replacement apparatus and the plasma processing module. The sensor detects the actual position of the consumable component after transfer, providing feedback information that enables correction of docking errors. This intermediary measurement system bridges the gap between the mobile apparatus and the precision requirement, allowing the system to maintain ease of operation while achieving manufacturing precision through detection and correction.
Solution Approach 2:
The patent implements a feedback mechanism where the position detection sensor measures the horizontal position of the consumable component on the lifter pins, and this detection result is used to adjust the position. The control circuitry receives the position information and commands position adjustment to correct misalignment. This closed-loop feedback system allows the mobile replacement apparatus to achieve precise positioning despite initial docking errors, resolving the contradiction between operational ease and manufacturing precision.
2Productivity
If automated transfer robots are used, then productivity is improved, but docking errors between modules cause positional misalignment that reduces reliability
Solution Approach 1:
The patent employs a feedback mechanism where the position detection sensor continuously monitors the horizontal position of the consumable component during automated transfer. The control circuitry receives this position information and automatically commands position adjustment to correct any misalignment caused by docking errors. This feedback-controlled system maintains high productivity through automation while ensuring reliability by correcting positional deviations, allowing the system to achieve both automated efficiency and transfer accuracy.
Solution Approach 2:
The patent replaces purely mechanical positioning with a detection-and-control system. Instead of relying solely on mechanical precision of the automated transfer robot and docking interfaces, the system uses electronic position detection and control circuitry to measure and correct positional deviations. This substitution of mechanical precision requirements with electronic measurement and control enhances both productivity (through automation) and reliability (through error correction).
Data Source
AI summary
A cluster tool includes a plasma processing apparatus, a mobile replacement apparatus, and control circuitry. The plasma processing apparatus includes a vacuum transfer module, a position detection sensor, and a plasma processing module including a support member, a consumable ring, and a lifter pin. The mobile replacement apparatus includes a ring storage portion that stores the consumable ring, and a ring replacement robot that transfers the consumable ring. The control circuitry executes a ring replacement sequence including connecting the mobile replacement apparatus to the plasma processing module, placing the consumable ring in the ring storage portion on the lifter pin, detecting a position of the consumable ring on the lifter pin, adjusting the position of the consumable ring on the lifter pin, and placing the consumable ring on a ring support surface.