Plasma Confinement Screen Layout for Uniform Substrate Processing
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Solution Overview
Problem
Existing plasma screens are ineffective in confining plasma in both vertical and radial directions during substrate processing, leading to non-uniform process results and inefficient energy use.
Innovation Solution
A plasma confinement screen system comprising an inner and outer annular plasma screen with adjustable vertical movement, allowing for enhanced vertical and radial control of the plasma cloud.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a single plasma screen is used to confine plasma, then vertical confinement is improved, but radial confinement remains ineffective
Solution Approach 1:
The plasma confinement system is divided into multiple independent screens (first plasma screen, second plasma screen, third plasma screen) positioned at different locations. Each screen contributes to different aspects of plasma confinement, with the inner screen providing radial confinement and the outer screen providing vertical confinement, thereby resolving the limitation of single-screen designs
Solution Approach 2:
The invention transitions from single-dimension confinement to multi-dimensional confinement by adding both radial confinement (through the inner screen with holes facing the substrate) and vertical confinement (through the outer screen positioned above the substrate). This multi-dimensional approach simultaneously improves both radial and vertical plasma control
2Device complexity
If plasma is left unconfined, then device complexity is reduced, but plasma scatter increases and process uniformity deteriorates
Solution Approach 1:
The plasma screens are designed with non-uniform hole distributions and different opening patterns tailored to local plasma behavior requirements. The inner screen has holes optimized for radial confinement near the substrate, while the outer screen has holes optimized for vertical confinement, creating locally optimized confinement zones throughout the processing chamber
Solution Approach 2:
The system allows dynamic adjustment of plasma confinement parameters by independently controlling the position and configuration of multiple screens. Operators can modify hole opening areas, screen positions, and relative configurations to optimize plasma confinement for different process conditions and substrate types
3Manufacturing precision
If plasma screens are added to confine plasma, then process uniformity is improved, but energy loss increases
Solution Approach 1:
The plasma screens are designed as porous structures with carefully controlled hole distributions rather than solid barriers. This allows plasma to pass through the screens while still providing confinement, reducing energy loss compared to solid wall configurations while maintaining effective plasma control and process uniformity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves plasma uniformity and reduces scatter, enhancing process uniformity and energy efficiency in substrate processing.
Implementation Method 1
a plasma confinement screen system extending from the process kit. The plasma confinement screen system includes: an inner plasma screen having an inner annular body with a central opening, the annular body including a plurality of first openings; and an outer plasma screen having an outer annular body with a central opening surrounding the inner plasma screen, the outer annular body including a plurality of second openings
Data Source
AI summary
A plasma confinement screen system for a process chamber includes an inner plasma screen having an inner annular body with a central opening, the annular body including a plurality of first openings; and an outer plasma screen having an outer annular body with a central opening surrounding the inner plasma screen, the outer annular body including a plurality of second openings, wherein the outer plasma screen is configured for vertical movement relative to the inner plasma screen.