Rotating Plasma Source Shield Heating for Debris Reuse
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Solution Overview
Problem
Existing plasma generation mechanisms face issues with debris accumulation and inefficient reuse of plasma raw material due to debris solidification and belching out in the direction normal to the rotation body surface, leading to increased replenishment frequency, especially at high irradiation frequencies.
Innovation Solution
A plasma generation mechanism with a rotation body, rotational drive source, raw material supply section, shielding portion, and heating mechanism, where the shielding portion is heated to a temperature above the plasma raw material's melting point, allowing debris to melt and return to the raw material supply, preventing accumulation and enhancing reuse.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a laser beam is applied to the rotation body surface to generate plasma, then high-intensity radiation can be obtained with a relatively simple configuration, but a large amount of debris belches out and adheres to the facing region, causing accumulation that affects EUV light emission
Solution Approach 1:
The invention converts the harmful debris into useful plasma raw material by heating the facing region to melt the debris, allowing it to return to the reservoir for reuse. This transforms the harmful accumulation problem into a beneficial recycling mechanism.
Solution Approach 2:
The invention changes the temperature parameter of the facing region by introducing a heating mechanism that raises the temperature to above the melting point of the plasma raw material, enabling the debris to melt and be reused instead of accumulating.
2Productivity
If the irradiation frequency is increased to improve productivity, then more radiation can be generated, but the debris accumulation problem worsens and plasma raw material is consumed faster
Solution Approach 1:
The invention recovers the plasma raw material that would otherwise be lost as debris by melting it in the heated facing region and returning it to the reservoir, enabling continuous reuse and reducing material consumption even at high irradiation frequencies.
Solution Approach 2:
The heating mechanism provides feedback by continuously maintaining the facing region at a temperature sufficient to melt debris, creating a self-regulating system that prevents accumulation and enables sustained high-frequency operation.
3Reliability
If the facing region is kept cool to prevent melting, then debris remains solid and can be contained, but the plasma raw material cannot be reused and must be replenished frequently
Solution Approach 1:
The invention changes the temperature parameter of the facing region from cool to hot (above melting point), enabling the debris to melt and return to the reservoir, thereby reducing replenishment frequency and improving productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents debris accumulation, reduces the frequency of plasma raw material replenishment, and maintains efficient radiation emission by reusing melted debris, thus optimizing the plasma generation process.
Implementation Method 1
a heating mechanism; wherein the heating mechanism heats the shielding portion to a temperature equal to or higher than a melting point of the plasma raw material
Implementation Method 2
a method of supplying a plasma raw material to a laser beam irradiation region using the centrifugal force of a rotation body
Data Source
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AI summary
[Object] To provide a plasma generation mechanism and a light source apparatus that are capable of preventing the accumulation of debris caused by plasma generation. [Solving Means] A plasma generation mechanism according to an embodiment of the present invention is a plasma generation mechanism included in a light source apparatus that extracts radiation by converting a liquid plasma raw material into plasma by application of an energy beam, the plasma generation mechanism including: a rotation body; a rotational drive source; a raw material supply section; a shielding portion; a heating mechanism; and a liquid guide portion. The rotation body has a rotation surface that rotates around a rotation axis. The rotational drive source causes the rotation body to rotate around the rotation axis. The raw material supply section supplies the plasma raw material to the rotation surface. The shielding portion faces an irradiation position of the rotation surface to be irradiated with the energy beam. The heating mechanism heats the shielding portion to a temperature equal to or higher than a melting point of the plasma raw material. The liquid guide portion guides, to the raw material supply section, the plasma raw material flowed in from the shielding portion.