Plasma Source Cooling via Segmented Permanent Magnets

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Solution Overview

Problem

Existing plasma sources with permanent magnets face challenges in reducing size while suppressing temperature rise, as previous solutions that aim to cool the magnets often increase the overall size of the plasma source.

Innovation Solution

A plasma source design featuring a chamber body with a pair of mirror magnets and a cusp magnet, where permanent magnets are arranged to create spaces for a cooling medium flow passage, minimizing the external dimensions and effectively cooling the magnets to prevent demagnetization.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If permanent magnets are used to confine plasma in a compact chamber, then the plasma source size is reduced, but the permanent magnets experience temperature rise and demagnetization

Engineering Contradiction:
Improveplasma source sizeVSAvoidpermanent magnet temperature
Core Design Contradiction:
Volume of moving objectVSTemperature

Solution Approach 1:

The permanent magnets are segmented into multiple smaller magnets arranged in an alternating polarity pattern around the chamber. This segmentation allows cooling channels to be positioned between adjacent magnets, enabling effective heat removal while maintaining the compact configuration and magnetic confinement functionality.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A cooling medium is introduced as an intermediary substance that flows through channels positioned between the segmented permanent magnets. This cooling medium acts as a heat transfer mediator, absorbing thermal energy from the magnets and carrying it away, thereby preventing demagnetization while preserving the compact plasma source design.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Temperature

If cooling channels are added to cool the permanent magnets, then temperature rise is suppressed, but the device complexity increases

Engineering Contradiction:
Improvepermanent magnet temperatureVSAvoidcooling system complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The cooling channels are merged with the structural framework that holds the segmented permanent magnets. The channels are positioned in the spaces between adjacent magnets, combining the cooling function with the magnetic array structure, thereby suppressing temperature rise without significantly increasing overall device complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The spaces between adjacent permanent magnets serve dual purposes: they maintain the magnetic field configuration for plasma confinement and simultaneously accommodate cooling channels. This multi-functional use of the inter-magnet spaces eliminates the need for separate cooling structures, reducing device complexity while effectively managing heat.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design achieves a reduction in plasma source size while effectively suppressing temperature rise in permanent magnets, maintaining the magnetic confinement necessary for plasma generation.

Implementation Method 1

a cooling medium flow passage provided in the spaces that passes a cooling medium for cooling the chamber body

Methodology Applied
Scientific EffectConvection: Convection

Implementation Method 2

a first mirror magnet and a second mirror magnet disposed around the chamber body... and a cusp magnet disposed around the chamber body... to confine plasma generated in a chamber body

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Data Source

PatentUS10470284B2Plasma source
Publication Date: 2019.11.05 NISSIN ION EQUIPMENT CO LTD
  • US10470284B2 patent drawing
  • US10470284B2 patent drawing
  • US10470284B2 patent drawing

AI summary

A plasma source is provided. The plasma source includes a chamber body inside which plasma is generated, a first mirror magnet, a second mirror magnet, and a cusp magnet provided around the chamber body and spaced apart in a axial direction thereof, each comprising permanent magnets radially spaced apart from each other to form spaces between adjacent permanent magnets thereof; and a cooling medium flow passage provided in the spaces that passes a cooling medium for cooling the chamber body.