Microwave Plasma Source Ignition Detection via Waveguide Temperature
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Solution Overview
Problem
Conventional microwave plasma processing apparatuses face challenges in reliably detecting ignition failures, particularly in tight spaces where plasma light emitting sensors are difficult to install, leading to potential damage to antenna members and wafers due to undetected abnormal discharges.
Innovation Solution
Incorporating a temperature detector in the microwave propagation path to monitor temperature anomalies, which serve as an indicator of ignition failure, allowing for proactive prevention of such failures by setting threshold values for warning and alarm generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a light emitting sensor is installed to detect plasma ignition, then plasma ignition detection reliability is improved, but device complexity and installation difficulty increase due to restricted space
Solution Approach 1:
The patent replaces the optical detection system (light emitting sensor) with a temperature-based detection system. A temperature sensor monitors temperature changes in the microwave propagation path, which serve as an indicator of plasma ignition status. This substitution eliminates the need for complex optical sensors in restricted spaces while maintaining detection reliability.
Solution Approach 2:
The patent introduces temperature as an intermediary parameter to indirectly detect plasma ignition. Instead of directly detecting plasma light emission, the system monitors temperature changes in the microwave propagation path caused by plasma formation, providing a reliable indirect detection method suitable for compact apparatuses.
2Reliability
If temperature detection is implemented in the microwave propagation path, then ignition failure detection capability is improved, but device complexity increases due to additional temperature detector
Solution Approach 1:
The patent substitutes complex optical detection systems with simpler temperature-based detection. By monitoring temperature changes in the microwave propagation path using a temperature sensor, the system achieves reliable ignition failure detection with simpler hardware and reduced installation complexity.
Solution Approach 2:
The microwave propagation path itself serves as the detection medium. The temperature changes occurring naturally in the propagation path during plasma ignition provide the detection signal, eliminating the need for separate complex detection systems. The existing structural components are utilized for detection purposes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively predicts and prevents ignition failures by monitoring temperature rises in the microwave propagation path, ensuring safety of antenna members and processed wafers, even in restricted spaces where traditional light emitting sensors are impractical.
Implementation Method 1
incorporating a temperature detector in the microwave propagation path to monitor temperature anomalies
Implementation Method 2
a microwave generation part configured to generate a microwave; a waveguide through which the microwave generated by the microwave generation part propagates
Implementation Method 3
an antenna part including a slot antenna and a microwave-transmitting plate, the slot antenna having a predetermined pattern of slots formed therein and being configured to radiate the microwave propagating through the waveguide into the processing space
Data Source
AI summary
A microwave plasma source that generates a microwave plasma in a processing space in which a target substrate is processed, includes: a microwave generation part for generating microwave; a waveguide through which the microwave generated by the microwave generation part propagates; an antenna part including a slot antenna having a predetermined pattern of slots formed therein and being configured to radiate the microwave propagating through the waveguide into the processing space and a microwave-transmitting plate being made of a dielectric material and being configured to transmit the microwave radiated from the slots therethrough and supply the microwave into the processing space; a temperature detector for detecting a temperature at a predetermined position in a microwave propagation path leading to the slot antenna; and an abnormality detection part for receiving the temperature detected by the temperature detector and detect an abnormality in the microwave propagation path based on the detected temperature.