Plasma Source Lamp House Correction Plates

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Solution Overview

Problem

Laser-sustained plasma light sources face issues with optical component distortions that increase pumping power requirements, plasma size, and decrease throughput due to aberrations in the pumping laser radiation and generated illumination.

Innovation Solution

A system and method using correction plates and reflector elements to modify pump illumination and broadband illumination, specifically employing aspherical correction plates and reflector elements to correct aberrations introduced by optical components, thereby improving the focus and collection efficiency of the plasma light source.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If optical components are used in laser-sustained plasma light sources, then the system can generate broadband illumination, but the optical components distort the pumping laser radiation and cause aberrations in the generated illumination

Engineering Contradiction:
Improvebroadband illumination generationVSAvoidoptical radiation distortion
Core Design Contradiction:
Illumination intensityVSManufacturing precision

Solution Approach 1:

A correction plate is introduced as an intermediary optical element between the pump source and plasma lamp. This correction plate compensates for the aberrations introduced by other optical components in the system, thereby reducing distortion of the pumping laser radiation and improving the quality of generated illumination without eliminating the necessary optical components

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The correction plate modifies the optical parameters of the pumping laser radiation by introducing opposite aberrations to cancel out the harmful distortions. This parameter adjustment allows the system to maintain broadband illumination generation while reducing the negative effects of optical component distortions

Inventive Principle:
Principle #35Parameter changes

2Illumination intensity

If optical components are used to generate broadband illumination, then illumination quality is improved, but heat management issues arise due to increased pumping power requirements

Engineering Contradiction:
Improvebroadband illumination qualityVSAvoidheat management
Core Design Contradiction:
Illumination intensityVSTemperature

Solution Approach 1:

The correction plate serves as a mediator that improves the efficiency of the optical system by reducing aberrations. This leads to better focusing of the pumping laser radiation, reduced energy waste, and consequently lower heat generation in the system while maintaining broadband illumination quality

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If optical components are used in the plasma light source, then the system can sustain plasma and generate illumination, but the focus of the pump source is distorted and plasma size increases

Engineering Contradiction:
Improveplasma sustentionVSAvoidplasma size
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

The correction plate is positioned as an intermediary element that pre-corrects the pumping laser radiation before it reaches the plasma lamp. This ensures that the plasma is sustained with a tighter, more focused pump source, preventing plasma size increase while maintaining reliable plasma sustention

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The correction plate performs preliminary correction of the optical aberrations in the pumping laser radiation before the radiation interacts with the plasma. This preliminary action ensures that the plasma is created and sustained with optimal focusing, preventing subsequent focus distortion and plasma size increase

Inventive Principle:
Principle #10Preliminary action

4Illumination intensity

If optical components are used to generate illumination, then the plasma can produce broadband radiation, but collection efficiency decreases due to aberrations

Engineering Contradiction:
Improvebroadband radiation generationVSAvoidcollection efficiency
Core Design Contradiction:
Illumination intensityVSProductivity

Solution Approach 1:

The correction plate acts as an intermediary that improves the quality of both the incoming pumping radiation and the outgoing broadband illumination. By reducing aberrations in the optical path, it enables more efficient collection of the generated broadband radiation while maintaining plasma's ability to produce broadband radiation

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution reduces the required pumping power, generates a tighter, brighter plasma focus, and enhances the collection of illumination, improving the overall efficiency and throughput of the laser-sustained plasma light source.

Implementation Method 1

Laser-sustained plasma light sources operate by focusing laser radiation into a volume of gas contained within a plasma lamp in order to excite the gas, such as argon or xenon, into a plasma state

Methodology Applied
Scientific EffectLaser: Laser

Implementation Method 2

a correction plate configured to receive the pump illumination and modify one or more characteristics of the pump illumination in order to correct one or more aberrations of the pump illumination introduced by one or more optical elements of the system

Methodology Applied
Scientific EffectOptical aberration correction:

Implementation Method 3

a reflector element configured to receive the pump illumination and direct the pump illumination to a volume of gas contained within a plasma lamp

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 4

the plasma lamp is configured to sustain a plasma within the volume of gas to generate broadband illumination

Methodology Applied
Scientific EffectPlasma: Plasma

Data Source

PatentUS10823943B2Plasma source with lamp house correction
Publication Date: 2020.11.03 KLA CORP
  • US10823943B2 patent drawing
  • US10823943B2 patent drawing
  • US10823943B2 patent drawing

AI summary

A plasma light source with lamp house correction is disclosed. The system may include a pump source configured to generate pump illumination. The pump illumination may be directed, by an elliptical reflector element, to a volume of gas contained within a plasma lamp in order to generate a plasma. The plasma may be configured to generate broadband illumination. The system may also include a correction plate and/or an aspherical elliptical reflector element configured to alter the pump illumination to correct for aberrations introduced by the plasma lamp. The system may also include an additional aspherical correction plate configured to alter the broadband illumination to correct for aberrations introduced by optical elements of the system.