Low-Power Plasma Source Using Quarter-Wave Antenna
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Solution Overview
Problem
Existing plasma sources, particularly those using high frequency electromagnetic radiation, face challenges such as requiring powerful magnetrons, inducing significant dimensional and technical constraints, and being bulky, making them inefficient for compact and modular applications.
Innovation Solution
A plasma source design featuring a quarter-wave antenna surrounded by radially distributed couplers, powered by a high frequency transistor oscillator, allowing for compact and modular operation with reduced power requirements, suitable for both light and ion sources.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a magnetron is used to generate high frequency electromagnetic radiation for plasma generation, then sufficient power (10 to 100 watts or more) can be provided at reasonable cost, but the device becomes bulky with significant dimensional constraints due to waveguides, cooling systems, and vacuum passages
Solution Approach 1:
The patent replaces the mechanical magnetron system with an electronic transistor-based oscillator system. This substitution eliminates the need for bulky mechanical components such as waveguides, cooling systems, and vacuum passages, achieving plasma generation with a compact electronic system that operates at lower power levels (0.2 to 5 watts) while maintaining the essential plasma generation function
Solution Approach 2:
The patent changes the operating parameters from high power (10-100 watts) to low power (0.2-5 watts) by using transistor oscillators instead of magnetrons. This parameter change enables the use of smaller, more compact components and eliminates the need for complex cooling and waveguide systems, directly resolving the volume constraint while maintaining plasma generation capability
2Power
If a magnetron is used to provide high power for plasma generation, then starting conditions can be easily obtained, but the device complexity increases due to cooling systems, waveguides, and vacuum passages
Solution Approach 1:
The patent replaces the complex mechanical magnetron system with a simple electronic transistor oscillator circuit. This substitution eliminates the need for complex auxiliary systems including waveguides, cooling systems, and vacuum passages, dramatically reducing device complexity while maintaining plasma generation capability at lower power levels
Solution Approach 2:
The patent extracts and removes the unnecessary complex components (cooling systems, waveguides, vacuum passages) from the plasma generation system, retaining only the essential oscillator and plasma chamber components. This extraction simplifies the overall device structure while maintaining the core plasma generation function
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design achieves plasma generation with low power consumption, enabling a compact and efficient plasma source that can be scaled for large-area applications, providing intense plasma and light sources without the need for cooling, while maintaining electromagnetic compatibility.
Implementation Method 1
by applying electromagnetic radiation to a gas at low pressure, this gas is likely to ionize and form a plasma in a zone where the high frequency electromagnetic field has sufficient intensity
Implementation Method 2
this gas is likely to ionize and form a plasma
Implementation Method 3
high frequency sources are known (in the region of centimeter waves, with a frequency of 0.4 to 10 GHz) using transistor oscillators
Data Source
Figure 1A~1C
Figure 2A~2F
Figure 3A~3F
AI summary
The invention relates to a plasma source including a first rod (3) forming a quarter-wave antenna, surrounded by at least one parallel rod forming a coupler (6, 7, 8) and which is substantially the same length as the first rod, set to a reference potential, the coupler rods being evenly distributed radially about the first rod, at a distance of around one-fifth to one-twentieth of the quarter of the wavelength.