Transformer-Coupled Plasma Source Layout for Lower RF Mode Transition Power
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Solution Overview
Problem
Existing plasma generator systems face challenges in efficiently transitioning from a capacitive mode to an inductive mode, requiring high RF power levels that increase wear on components and reduce system efficiency.
Innovation Solution
The design incorporates a radio frequency (RF) generator with a specific coil configuration, where the radial distance between the RF coils and the electrically conductive portion of the collar assembly is greater than or equal to 40 mm, and the use of a dielectric window transmissive to RF energy, to reduce eddy current formation and lower the power threshold for mode transition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If high RF power levels are used to transition from capacitive mode to inductive mode, then the mode transition is achieved, but component wear increases and system efficiency decreases
Solution Approach 1:
The patent modifies the geometric parameters of the plasma generation system by increasing the radial distance between the RF coil and the collar assembly to at least 40 mm. This parameter change reduces the coupling between the coil and conductive structures, thereby reducing eddy current losses and enabling mode transition at lower RF power levels, which extends component lifespan and improves reliability.
2Power
If high RF power levels are used to transition from capacitive mode to inductive mode, then the mode transition is achieved, but system efficiency decreases
Solution Approach 1:
The patent changes the spatial parameter of the system by increasing the radial distance between the RF coil and the collar assembly to at least 40 mm. This reduces parasitic eddy current losses in the collar assembly, thereby improving energy efficiency and reducing the RF power required for mode transition.
3Loss of energy
If the radial distance between RF coils and collar assembly is increased to reduce eddy currents, then energy efficiency improves, but device complexity increases
Solution Approach 1:
The patent applies a straightforward geometric parameter change - increasing the radial distance to at least 40 mm - which reduces eddy current losses without requiring complex coil configurations, multiple coils, or intricate structural modifications. The solution maintains simplicity while achieving the energy efficiency goal.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the RF power required to transition from capacitive to inductive mode, thereby extending the lifespan of system components, reducing maintenance costs, and improving overall plasma generation efficiency.
Implementation Method 1
a window (104) including a dielectric material that is transmissive to radio frequency (RF) energy
Implementation Method 2
one or more RF coils positioned above the second side of the window, wherein, when viewed along a first axis perpendicular to the window
Implementation Method 3
create a plasma that, when a process gas is flowed into them, creates neutral particles, ions, and/or radicals of the process gas
Data Source
AI summary
An apparatus, comprising: a process chamber, wherein the process chamber comprises: a window, wherein the window comprises a dielectric material that is transmissive to radio frequency (RF) energy, wherein the window has a first side and a second side opposite the first side; a collar assembly having an aperture covered by the window, wherein the collar assembly supports the first side of the window; and one or more RF coils positioned above the second side of the window, wherein, when viewed along a first axis perpendicular to the window, a radial distance between an outermost portion of the one or more RF coils and an innermost portion of an electrically conductive portion of the collar assembly that intersects with a first reference plane that is perpendicular to the first axis and between the first side of the window and the one or more RF coils is greater than or equal to 40 mm.