Adjustable Magnetic Flux Plasma Source for Uniform Target Wear
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing plasma sources in ion implantation apparatuses suffer from non-uniform consumption of reflectors or sputtering targets due to fixed magnetic flux directions, leading to localized wear rather than uniform wear patterns.
Innovation Solution
A plasma source design that includes a chamber with a cathode and an electromagnet featuring adjustable magnetic flux passing members, such as yoke components and magnetic pole members, allowing for changeable orientation, size, and presence of magnetic flux components to direct the magnetic flux more uniformly across the target.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a fixed magnetic flux direction is used in the plasma source, then the device structure is simple, but the target consumption becomes non-uniform leading to localized wear
Solution Approach 1:
The electromagnet is divided into multiple independent yoke components (first yoke component, second yoke component, third yoke component) that can be adjusted separately. Each yoke component can be positioned independently to control the magnetic flux distribution, allowing uniform target consumption while maintaining manageable device complexity through modular design.
Solution Approach 2:
The yoke components are made adjustable rather than fixed, allowing the magnetic flux direction and distribution to be dynamically changed. The first yoke component can be positioned at different locations along the third yoke component to optimize magnetic flux distribution for uniform target consumption, transforming the static system into a dynamic one that adapts to operational requirements.
2Duration of action of stationary object
If the magnetic flux direction is adjusted to achieve uniform target consumption, then the target lifespan is extended, but the device complexity increases due to multiple adjustable components
Solution Approach 1:
The electromagnet is segmented into multiple adjustable yoke components that can be independently positioned. This segmentation allows precise control over magnetic flux distribution to achieve uniform target consumption and extend target lifespan, while the modular structure keeps the increased complexity manageable through standardized components.
Solution Approach 2:
The adjustable yoke components serve multiple functions: they control magnetic flux direction, distribute magnetic flux uniformly across the target, and can be repositioned for different operational requirements. This multi-functionality justifies the increased device complexity by providing versatile control capabilities that extend target usage.
3Manufacturing precision
If multiple adjustable yoke components are used to control magnetic flux distribution, then the electron and ion distribution becomes uniform, but the ease of operation decreases due to more adjustment parameters
Solution Approach 1:
The electromagnet is divided into discrete, independently adjustable yoke components. This segmentation allows operators to make small, incremental adjustments to specific components rather than dealing with a complex monolithic system, making the adjustment process more manageable while achieving uniform electron and ion distribution.
Solution Approach 2:
Each yoke component can be adjusted independently to optimize magnetic flux distribution in its specific region. This local adjustability allows operators to focus on specific areas that need optimization, making the overall adjustment process easier while achieving uniform distribution across the entire target area.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables more uniform consumption of targets by adjusting the magnetic flux direction, preventing localized wear and ensuring even distribution of electrons and ions, thereby extending the lifespan of reflectors and sputtering targets.
Implementation Method 1
a magnetic flux generated by energization of the coil
Implementation Method 2
A direction of electrons emitted from the plasma source may be changed by a magnetic flux
Data Source
AI summary
A plasma source includes a chamber in which plasma is generated, a cathode provided in the chamber that emits electrons into the chamber, and an electromagnet provided around the chamber. The electromagnet includes a coil and magnetic flux passing members that cause a magnetic flux generated by energization of the coil to reach the inside of the chamber. A usage mode of one or more of the magnetic flux passing members is changeable.