Plasma Spray Ceramic Coating for Particle Control
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Solution Overview
Problem
In the semiconductor industry, plasma etch and clean processes can lead to corrosion and particle contamination in processing chambers, which increases device defects as device geometries shrink, requiring more stringent particle contamination control.
Innovation Solution
A ceramic coating is applied using a plasma spraying system with specific parameters to create a dense, smooth surface with built-in compressive stress, comprising materials like Y2O3, Y4Al2O9, and solid-solutions with ZrO2, Al2O3, and other oxides, forming pancake-shaped splats in an amorphous phase to reduce porosity and cracking.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional plasma spray coating is used, then coating can be applied to protect against plasma corrosion, but the coating contains porosity and cracking that generate particle contamination
Solution Approach 1:
The patent applies parameter changes by controlling plasma spray parameters (plasma power, substrate temperature, spray distance) to achieve specific coating microstructure. The substrate temperature is maintained at 50-150°C during spraying, and plasma power is controlled at 20-50 kW to produce a coating with controlled porosity (0.1-5%) and compressive stress, preventing particle generation while maintaining plasma resistance
Solution Approach 2:
The patent uses composite materials by creating a coating with controlled combination of crystalline and amorphous phases. The coating contains 20-80 wt% crystalline phase (such as alumina, silica, or spinel) and 20-80 wt% amorphous phase, forming a composite structure that provides both plasma resistance and reduced particle contamination through controlled porosity and stress distribution
2Manufacturing precision
If device geometries are shrunk to improve manufacturing precision, then device performance is enhanced, but susceptibility to particle contamination increases
Solution Approach 1:
The patent applies this principle by creating a protective coating that can be applied and renewed on processing chamber components. The coating serves as a sacrificial protective layer that prevents particle generation from substrate corrosion, allowing the underlying precision components to remain protected and functional for extended periods
3Reliability
If different chamber materials are used to improve plasma resistance, then material durability is enhanced, but material cost and other properties vary
Solution Approach 1:
The patent applies universality by developing a multi-functional plasma spray coating that simultaneously provides plasma resistance, erosion resistance, and controlled porosity to prevent particle generation. The coating can be applied to various substrates (metal, ceramic, polymer) and provides multiple protective functions, reducing the need to select from multiple different material options
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The coating significantly reduces on-wafer particle contamination, enhances erosion resistance, and extends the useful lifetime of components by minimizing porosity and cracking, improving on-wafer defect performance and resistance to chemical attacks.
Implementation Method 1
performing a plasma spray process by the plasma spraying system to coat at least one surface of the body with a ceramic coating
Implementation Method 2
expose a substrate to a high-speed stream of plasma to etch or clean the substrate
Data Source
AI summary
An article includes a body having a plasma-sprayed ceramic coating on a surface thereof. The body can be formed of at one least one of the following materials: Al, Al2O3, AlN, Y2O3, YSZ, or SiC. The plasma-sprayed ceramic coating can include at least one of Y2O3, Y4Al2O9, Y3Al5O12 or a solid-solution of Y2O3 mixed with at least one of ZrO2, Al2O3, HfO2, Er2O3, Nd2O3, Nb2O5, CeO2, Sm2O3 or Yb2O3. The plasma-sprayed ceramic coating can further include splats.