Plasma Spray Coating for Electrostatic Chuck Adhesive

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Solution Overview

Problem

The adhesive agent used between the electrostatic chuck and the base member in plasma processing apparatuses lacks plasma resistance, leading to wear and tear when exposed to plasma, resulting in reduced electrostatic chuck lifespan and increased maintenance and replacement costs.

Innovation Solution

A thermal spraying method using a plasma spraying apparatus with a nozzle and plasma generating unit to apply feedstock powder with a particle diameter of 15 μm or less, generating a plasma to liquefy and deposit a ceramic film on the adhesive layer, providing high plasma resistance and protecting it from wear.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the adhesive agent is exposed to plasma, then the plasma processing can be performed, but the adhesive agent is worn down and the electrostatic chuck lifespan is reduced

Engineering Contradiction:

Improveelectrostatic chuck lifespanVSAvoidplasma wear on adhesive agent

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A ceramic coating layer is applied as an intermediary protective layer between the plasma environment and the adhesive agent. This ceramic layer acts as a mediator that withstands plasma exposure while protecting the underlying adhesive from degradation, thereby extending the electrostatic chuck lifespan without interfering with plasma processing functionality.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The solution employs a composite structure combining the adhesive agent with a ceramic coating layer. This composite material approach leverages the bonding properties of the adhesive and the plasma resistance of the ceramic material, creating a multi-layer structure that simultaneously achieves adhesion and plasma protection.

Inventive Principle:

Principle #40Composite materials

2Reliability

If the exposed part of the adhesive agent is coated with material having high plasma resistance, then the plasma resistance is improved, but it is difficult to coat the narrow gap of several hundred micrometers width

Engineering Contradiction:

Improveplasma resistance of adhesive agentVSAvoidcoating processability of narrow gap

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

The patent applies parameter changes by using thermal spraying technology with specifically controlled parameters (particle diameter of feedstock powder, spraying distance, gas flow rates) to enable effective coating of narrow gaps. By optimizing these process parameters, the coating can be successfully applied to the narrow gap region between the electrostatic chuck and base member despite the manufacturing difficulties.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The solution replaces conventional coating methods with thermal spraying technology. This substitution enables coating of narrow gaps by using a non-contact, aerosol-based deposition process that can reach into tight spaces where traditional brush or roller coating methods would be ineffective.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method effectively extends the lifespan of the electrostatic chuck by creating a plasma-resistant ceramic film on the adhesive layer, reducing maintenance and replacement costs while maintaining high adhesion and quality of the thermal sprayed film.

Implementation Method 1

a plasma generating unit having a common axis with the nozzle... generating a plasma from the plasma generating gas in the plasma generating unit, by using electric power not more than 50 kW

Methodology Applied

Scientific EffectPlasma generation: Plasma

Implementation Method 2

thermal spraying the feedstock powder liquefied by the plasma

Methodology Applied

Scientific EffectThermal heating: Heating

Implementation Method 3

thermal spraying the feedstock powder liquefied by the plasma at the component through a mask, such that a surface of a resin layer of the component is covered with the feedstock powder

Methodology Applied

Scientific EffectThermal spraying: Plasma Spray

Data Source

PatentUS11328905B2Thermal spraying method of component for plasma processing apparatus and component for plasma processing apparatus

Publication Date: 2022.05.10 TOKYO ELECTRON LTD

AI summary

There is provision of a thermal spraying method of a component for a plasma processing apparatus performed by a plasma spraying apparatus including a nozzle and a plasma generating unit having a common axis with the nozzle. The method includes a step of injecting, with a plasma generating gas, feedstock powder having a particle diameter of 15 μm or less from a tip of the nozzle to the plasma generating unit, a step of generating a plasma from the plasma generating gas in the plasma generating unit, by using electric power not more than 50 kW, and a step of thermal spraying the feedstock powder liquefied by the plasma at the component through a mask, such that a surface of a resin layer of the component is covered with the feedstock powder.