Macroscopic Surface Texturing for Plasma Chamber Coating Adhesion
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Solution Overview
Problem
Current semiconductor processing systems face issues with delamination of spray coatings on aluminum surfaces due to insufficient adhesion, leading to contamination and particle defects, and byproducts adhering to surfaces causing wafer defects and electrostatic chuck malfunction.
Innovation Solution
Implement macroscopic texturing on plasma-facing surfaces of consumable parts by creating patterned, large-scale features to enhance adhesion of additional layers and byproducts, using methods like masking and media blasting to form engineered surfaces with raised features.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If grit blasting is used to create random microscopic features on aluminum surfaces, then surface adhesion is improved, but delamination still occurs near surface transitions (corners, edges) leading to coating failure
Solution Approach 1:
The surface is segmented into multiple zones with different texturing characteristics: macroscopic features (0.1-3.0 mm) provide overall adhesion enhancement, while microscopic features (micrometer scale) provide localized bonding sites. This multi-scale segmentation allows the coating to adhere effectively across the entire surface including transition regions.
Solution Approach 2:
The invention transitions from single-scale microscopic roughening to multi-scale texturing by adding macroscopic features (0.1-3.0 mm) alongside microscopic features. This dimensional expansion creates a hierarchical surface structure that addresses both general adhesion and localized stress distribution at surface transitions.
2Object-affected harmful factors
If spray coating is applied to anodized aluminum surfaces, then plasma resistance is achieved, but delamination occurs causing on-wafer metal contamination and particle defects
Solution Approach 1:
The surface is prepared with multi-scale texturing and anodization before spray coating application. The macroscopic and microscopic features are created in advance to provide enhanced bonding sites, ensuring the coating adheres properly and prevents metal contamination during plasma exposure.
Solution Approach 2:
The solution employs a composite surface structure combining anodized aluminum with spray-coated plasma-resistant material. The multi-scale texturing creates a composite interface that enhances bonding between the substrate and coating, preventing delamination and subsequent contamination.
3Productivity
If consumable parts are used in plasma chambers, then wafer processing is enabled, but byproducts adhere to surfaces causing wafer defects and electrostatic chuck malfunction
Solution Approach 1:
The surface treatment is applied locally to plasma-facing surfaces of consumable parts. The macroscopic and microscopic texturing is concentrated on areas most susceptible to byproduct adhesion, such as the electrostatic chuck and plasma confinement surfaces, providing targeted contamination resistance.
4Reliability
If conventional surface treatment is used, then initial coating adhesion is achieved, but service life is limited due to delamination and contamination
Solution Approach 1:
The macroscopic features include rounded corners and curved surfaces instead of sharp edges. This curvature reduces stress concentration points that would otherwise initiate delamination, extending the service life of the coating by preventing crack propagation.
Solution Approach 2:
The invention converts the typically harmful effect of surface transitions (corners, edges) into beneficial features by rounding them and incorporating them into the macroscopic feature pattern. This eliminates stress concentration while maintaining the adhesion-enhancing benefits of surface texturing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances adhesion of plasma-resistant coatings, reduces delamination, captures byproducts effectively, and increases the lifetime and service life of consumable parts, thereby reducing operational costs and tool downtime.
Implementation Method 1
The consumable part is configured to be exposed to a plasma and byproducts of the plasma
Implementation Method 2
masking and media blasting to form engineered surfaces with raised features
Data Source
AI summary
A consumable part for a plasma processing chamber includes a plasma facing side. An engineered surface is formed into the plasma facing side of the consumable part. A plurality of raised features defines the engineered surface, wherein features are arranged in a predefined pattern, wherein each of the plurality of raised features includes a top region having an outer edge and a sidewall. A base surface of the engineered surface is configured to surround each of the plurality of raised features, such that a corresponding sidewall of a corresponding raised feature extends up at an angle from the base surface to a corresponding top region. The consumable part is configured to be installed in the plasma processing chamber. The consumable part is configured to be exposed to a plasma and byproducts of the plasma.